Method for improving spectral resolution of soft X-ray flat focal field spectrometer
A spectral resolution, X-ray technology, applied in radiation pyrometry, spectrometry/spectrophotometry/monochromator, instruments, etc., can solve the problems of system complexity, difficulty in miniaturization, loss of luminous flux, etc. , to achieve the effect of improving spectral resolution
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Embodiment 1
[0038] Select the grating in the literature (Performance of laminar-type holographic grating for a soft x-ray flat-field spectrograph in the0.7-6nm region) for partition design, the center line density of the grating is 2400gs / mm, and the line density parameter is b 2 =-62,b 3 =40007.5, b 4 =-369802.6, the radius of curvature of the base is 15920mm, and the wavelength used is 0.7-6nm.
[0039] according to figure 2 with image 3 According to the analysis, the aberration in the 0.7-1.3nm band is serious, so this band is selected for further optimization. First, if Figure 4 Divide the grating into regions I, II and III, and investigate the imaging characteristics of different grating regions at each wavelength ( Figure 5 ), it can be seen that the aberrations in areas I and II are relatively large, and the image centers of the three areas are not at the same height, which leads to serious aberrations in this band. According to the previous analysis, in order to further ...
Embodiment 2
[0041] The grating is the same as Example 1, and the designed partition groove parameters: the duty ratios corresponding to regions I, II and III are 0.1, 0.2 and 0.425 respectively, and the groove depths are 15, 15 and 4.5nm respectively. The ray tracing results in Image 6 , 7 In , 8, at 0.8nm, the spectral resolution does not change much compared to Example 1, from 383 to 425, at 1.1nm, it increases from 620 to 712, and at 4.0nm, the spectral resolution changes from 1035 to 1169 . Compared with Example 1, Example 2 further suppresses the diffraction efficiency in the larger aberration region, and improves the spectral resolution to a certain extent.
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