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Dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor

A magnetic field sensor, double torsional pendulum technology, applied in the field of sensors, to achieve the effects of easy driving, reliable performance and simple structure

Inactive Publication Date: 2013-12-25
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These magnetic field sensors can only measure the magnitude of the magnetic field

Method used

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  • Dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor

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Embodiment Construction

[0023] specific implementation plan

[0024] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] Such as Figure 1 to Figure 7 As shown, a double-twisting microcomputer electromagnetic field sensor of the present invention includes a substrate 12, a bottom electrode layer 13, a sacrificial layer 14, a metal layer 15 and a silicon nitride layer 16 that are sequentially stacked from bottom to top. The sacrificial layer 14, the metal layer 15 and the silicon nitride layer 16 are all hollow structures. An anchor region 17 is provided on the top surface of the silicon nitride layer 16 . One side of the anchor area 17 is provided with a second pad 62, a fourth pad 82 and two fifth pads 92, and the other side of the anchor area 17 is provided with a first pad 52, a third pad 72, and a tenth pad 112. and two sixth pads 102 . The middle part of the silicon nitride layer 16 is provided with the fir...

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Abstract

The invention discloses a dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor. The dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor comprises a substrate, a bottom electrode layer, a sacrificial layer, a metal layer and a silicon nitride layer, wherein the substrate, the bottom electrode layer, the sacrificial layer, the metal layer and the silicon nitride layer are overlaid from bottom to top in sequence. An anchoring area is arranged on the top face of the silicon nitride layer, a second bonding pad, a fourth bonding pad and two fifth bonding pads are arranged on one side of the anchoring area, and a first bonding pad, a third bonding pad, a tenth bonding pad and two sixth bonding pads are arranged on the other side of the anchoring area; a first torsion pendulum beam is arranged in the middle of the silicon nitride layer, and the first torsion pendulum beam is fixedly connected with the anchoring area through two first supporting beams; a second torsion pendulum beam is arranged on the inner side of the first torsion pendulum beam; first drive metal wires and second drive metal wires are arranged on the edge of the first torsion pendulum beam and the second torsion pendulum beam; a first capacitor and a second capacitor are arranged on the bottom face of the first torsion pendulum beam; a third capacitor and a fourth capacitor are arranged on the bottom face of the second torsion pendulum beam. The dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor is capable of measuring the amplitude and the angles of magnetic fields, and is simple in structure.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a double torsion pendulum type microcomputer electromagnetic field sensor. Background technique [0002] Magnetic field sensors have a long history, from the invention of the compass to modern traffic navigation, magnetic field sensors have been paid more and more attention. [0003] Magnetic field sensors are closely related to our lives. There are magnetic fields or information related to magnetic fields in many places in nature and human society. The magnetic field generated by artificial permanent magnets can be used as a carrier of many kinds of information. Therefore, the task of detecting, collecting, storing, converting, reproducing and monitoring various magnetic fields and various information carried in magnetic fields naturally falls on the magnetic field sensor. Magnetic sensors using various physical, chemical and biological effects have been developed,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/02
Inventor 陈洁梁秋实周志浩薛铭豪景晟
Owner SOUTHEAST UNIV
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