Semi-active vibration isolation system

Abstract

The invention relates to a semi-active vibration isolation system. The semi-active vibration isolation system comprises a basal disc and an upper working table, wherein a vibration isolation mechanism is arranged between the basal disc and the upper working table, and comprises a spring and a buffer device; the buffer device is connected with a sensor placed on the upper working table through a controller. The semi-active vibration isolation system is characterized in that the adjustable buffer device is adopted; the integral vibration isolation system is formed by the adjustable buffer device, the controller, the sensor and the spring. The semi-active vibration isolation system has the benefits that the semi-active vibration isolation system is communicated with the controller through a pressure sensor and the sensor, resonant frequency can be avoided more actively, the vibration convey rate can be improved, the pressure variation and altitude variation caused by movement of upper loads can be responded actively, and the vibration time can be greatly reduced. The semi-active vibration isolation system has the effects that the resonant frequency is reduced actively, and frequencies beyond the resonant frequency can obtain relatively high vibration convey rate.

Description

technical field [0001] The invention belongs to a vibration elimination system, in particular to a semi-active vibration elimination system. Background technique [0002] Generally, vibration isolators are used for precision testing equipment, LCD manufacturing equipment, semiconductor manufacturing equipment, and other equipment that is weaker than vibration. External vibrations have the potential to degrade the inherent performance of these equipment, so it is necessary to use vibration isolation devices to prevent external vibrations from being transmitted to these equipment. Such as Figure 9-1 , Figure 9-2 As shown, the mainstream method of the vibration isolation system in the prior art is the method of using springs and buffers. Although the production cost of this method is low, its disadvantage is that the vibration isolation performance is limited, and there is no additional means to achieve better vibration isolation performance. Compared with the passive vibr...

AI Technical Summary

Problems solved by technology

Although the production cost of this method is low, its disadvantage is that the vibration isolation performance is limited, and there is no additional means to achieve better vibration isolation performance

Its defect is that the vibration isolation performance is limited, and it is not suitable for use on precision testing equipment, LCD manufacturing equipment, and semiconductor manufacturing equipment.

Especially with the widespread application of manipulators in industrial automation, when the moving load moves with the manipulator, it is required that the time for the load to return to its original position should be as short as possible, otherwise the production efficiency will decrease

Images