Small-sized echelette grating spectrometer

Abstract

The invention discloses a small-sized echelette grating spectrometer. The small-sized echelette grating spectrometer comprises an optical input unit, a panel waveguide structure, a small-sized grating light splitting module and a linear array detector, wherein the panel waveguide structure comprises an upper waveguide plate and a lower waveguide plate, the upper waveguide plate and the lower waveguide plate are placed in a parallel mode, and the reflecting surface of the upper waveguide plate and the reflecting surface of the lower waveguide plate are vertically arranged in an opposite mode, so that an optical channel is formed between the reflecting surfaces, and light from the optical input unit spreads in the optical channel; after collimation, dispersion and convergence are carried out on the light rays in the direction parallel to a panel, a spectrum image is formed, and is received by the linear array detector, and the light is reflected between an upper panel reflector and a lower panel reflector in the direction perpendicular to the panel, and is limited in a waveguide thin layer. Therefore, the size of a corresponding collimation optical element, the size of a corresponding dispersion optical element and the size of a corresponding convergence optical element in the perpendicular direction can be quite small, and the size of a whole optical system can be remarkably reduced. The optical elements used in the small-sized echelette grating spectrometer are low in requirement for the processing technology, and production cost can be reduced.

Description

technical field [0001] The invention relates to the field of small spectrometers, in particular to a small infrared grating spectrometer that allows light to propagate in a waveguide to reduce the size of the instrument. Background technique [0002] Infrared spectrum analysis and detection technology has been widely used in modern scientific experiments, medical and medical research, industrial and agricultural production, national defense security, environmental monitoring and other fields. In these applications, there is an increasing need for instrument miniaturization. Miniaturization means greater flexibility of use, better environmental adaptability, and lower production costs. [0003] Miniaturized spectroscopic instruments work on the same principle as conventional spectroscopic instruments. as attached figure 1 As shown, it is a structure of a traditional grating spectrometer, specifically a crossed asymmetrical Czerny-Turner structure. The light rays pass thro...

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Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the performance of the instrument i

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