Thickness detection device and method using digital optical technology
A technology of thickness detection and digital optics, which is applied in the direction of optical devices, measuring devices, optics, etc., can solve problems such as longer detection time, inability to obtain correct information on the thickness of the detection object, and light loss, and achieve the effect of improving detection efficiency
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no. 1 example 100
[0062] The beam splitter 150 is a device for detecting the spectrum of light reflected from the detection object 105 . According to the first embodiment 100 of the present invention, the first beam splitter 151 and the second beam splitter 152 are included, but they are not limited thereto, and more than three beam splitters can be configured according to the needs of users.
[0063] Such as Figure 3a As shown, the first beam splitter 151 is arranged on the optical path where the light is reflected at a reflection angle of 100° from the reflective optical path conversion unit 140, and the second beam splitter 152 is arranged on the optical path where the light is reflected from the reflective optical path conversion unit 140 at an angle of 80°. Angle on the reflected light path. However, it is not limited to this angle, as long as each beam splitter 150 is placed on an optical path having a different reflection angle from the reflective optical path conversion unit 140 .
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no. 1 example S100
[0083] The thickness detection step S140 is a step of irradiating the spectrum of light incident on the beam splitter 150 , detecting the reflectance of the light, and measuring the thickness of the detection object 105 based on this. According to the first embodiment S100 of the present invention, the thickness detection step S140 includes a reflectance detection step S141 , a reflectance comparison step S142 and a thickness output step S143 . However, the thickness detection step S140 is not limited to the above steps.
[0084] The reflectance detection step S141 calculates the reflectance of the detection area by analyzing the spectrum of the light incident on the beam splitter and using the light quantity data of each wavelength of the light.
[0085] The reflectance comparison step S142 is a step of searching for a model with the most similar reflectance by comparing the reflectance of the detection area obtained in the reflectance detection step S141 with the reflectance o...
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