Automatic lot sizing static rolling testing device for MEMS acceleration sensor
A technology of acceleration sensor and test device, which is applied in measurement device, test/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, etc. Time-consuming and other problems, to achieve the effect of reducing the time-consuming of calibration and calibration, improving the efficiency of calibration and calibration, and improving the ability of calibration and calibration
Inactive Publication Date: 2014-02-19
ZHONGBEI UNIV
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[0003] The present invention provides an automatic batch MEMS acceleration sensor static rollover test device in order to solve the problems of time-consuming calibration and calibration, low calibration calibration efficiency, and limited calibration calibration capability of existing MEMS acceleration sensor static calibration test equipment
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[0012] Automatic batch MEMS acceleration sensor static roll test device, including automatic loading platform, feedback automatic roll platform, control system, data acquisition system;
[0013] The automatic loading platform includes a vertical loading platform, a horizontal loading platform, and a grooved base 1;
[0014] The vertical loading platform includes a left vertical motor 2, a left vertical lead screw pair 3, a left vertical guide rail pair 4, a left L-shaped base plate 5, a right vertical motor 6, a right vertical lead screw pair 7, a right vertical Straight guide rail pair 8, right L-shaped bottom plate 9;
[0015] The horizontal loading platform includes a left horizontal motor 10, a left horizontal screw pair 11, a left horizontal guide rail pair 12, a left connector 13, a stepper motor 14, a left pin shaft 15, a right horizontal motor 16, and a right horizontal screw pair 17 , right horizontal guide rail pair 18, right connector 19, right pin shaft 20;
[0016...
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The invention relates to the technology of the calibration and the correction of MEMS acceleration sensors, in particular to an automatic lot sizing static rolling testing device for an MEMS acceleration sensor. The automatic lot sizing static rolling testing device for the MEMS acceleration sensor solves the problems that an existing static rolling testing device for the MEMS acceleration sensor is much in consumed time for the calibration and the correction and low in calibration and correction efficiency and is limited in calibration and correction capacity. The automatic lot sizing static rolling testing device for the MEMS acceleration sensor comprises an automatic loading platform, a feedback type automatic rolling platform, a control system and a data collecting system. The automatic loading platform comprises a vertical loading platform, a horizontal loading platform and a trough-type base. The vertical loading platform comprises a left vertical motor, a left vertical lead screw pair, left vertical guide rail pairs, a left L-type base plate, a right vertical motor, a right vertical lead screw pair, right vertical guide rail pairs and a right L-type base plate. The feedback type automatic rolling platform comprises semi-closed trough-type platform decks and inclined angle sensors. The automatic lot sizing static rolling testing device for the MEMS acceleration sensor is suitable for the calibration and the correction of the MEMS acceleration sensors.
Description
technical field [0001] The invention relates to calibration and calibration technology of MEMS acceleration sensors, in particular to an automatic batch MEMS acceleration sensor static rolling test device. Background technique [0002] MEMS acceleration sensors are widely used in automotive electronics, wireless communications, biomedicine, aerospace, industry, agriculture and other fields. Whether the MEMS acceleration sensor is developed or used, calibration and calibration of performance parameters are required to ensure the accuracy of the MEMS acceleration sensor in practical applications. According to different calibration requirements, MEMS acceleration sensors usually undergo mechanical tests, environmental tests, and long-term stability and repeatability tests. Among them, the mechanical test is divided into static test and dynamic test. Static test is divided into gravity field static tumbling test, centrifugal test and so on. The gravity field static roll test...
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IPC IPC(8): G01P21/00
Inventor 石云波刘俊唐军马宗敏丑修建赵赟薛彦辉于春华
Owner ZHONGBEI UNIV