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Testing calibration instrument, testing system and testing method

A test system and test method technology, applied in the field of test calibrators, can solve problems such as test items failing to pass, and achieve the effect of improving reliability

Active Publication Date: 2014-02-19
SINO IC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a test calibrator, test system and test method, to solve the problem that in the existing chip test, the performance and debugging state of the two test machines are all the same (that is, the test conditions output by the two test machines In the case of the same), the problem that the test item passed under the first test machine cannot be passed under the second test machine

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  • Testing calibration instrument, testing system and testing method

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Embodiment Construction

[0032] The test calibrator, test system and test method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0033] Please refer to figure 1 , which is a schematic diagram of the frame structure of the testing and calibrating instrument according to the embodiment of the present invention. like figure 1 As shown, the test calibrator 1 includes:

[0034] The test information acquisition module 10 is used to obtain the test conditions received by the device under test and the obtained test conditions for each test item of each test machine when multiple test m...

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Abstract

The invention provides a testing calibration instrument, a testing system and a testing method. Test items to be checked and test conditions received by the test items to be checked are screened out from multiple test items through an analysis module, wherein the test items to be checked meet the following requirement: when multiple testing machines test the test items to be checked, test results of the test items to be checked in a part of testing machines are qualified, test results of the test items to be checked in the other part of testing machines are not qualified, accordingly the testing conditions output by the testing machines enabling the test results of the test items to be checked to be not qualified can be adjusted, the test results is finally judged, and the reliability of the test results is improved.

Description

technical field [0001] The invention relates to the technical field of integrated circuit manufacturing equipment, in particular to a test calibrator, a test system and a test method. Background technique [0002] Due to the rapid introduction of increasingly complex integrated circuits, materials and processes, it is nearly impossible to meet every chip to specification in today's silicon wafer manufacturing. In order to correct problems in the production process and ensure that defective chips will not be sent to customers, chip testing (CP, Circuit Probing) is introduced in the integrated circuit manufacturing process. Chip testing is electrical parameter measurement and functional testing performed on silicon wafer-level integrated circuits in order to verify the consistency of specifications. The test can verify whether each chip has acceptable electrical performance and complete functions, and the electrical specifications used in the test process vary with the purpos...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R35/00G01R31/28
Inventor 王玉龙祁建华刘远华郝丹丹叶建明
Owner SINO IC TECH