Superspeed precision positioning tandem one-dimensional platform
A technology for precise positioning and positioning platform, applied in the field of platform, can solve problems such as precise positioning that cannot break through high acceleration
Active Publication Date: 2014-02-26
GUANGDONG HUST IND TECH RES INST
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[0004] The purpose of the present invention is to overcome the defects of the prior art and provide a serial ultra-high-speed precision positioning one-dimensional platform. The precise positioning one-dimensional platform solves the problem of precise positioning that cannot break through higher acceleration in the prior art
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[0026] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0027] like figure 1 , an embodiment of the present invention provides a series-type ultra-high-speed precision positioning one-dimensional platform, including a base 4, a first motor 1 and a second motor 5 connected in series with each other, a motor driven by the first motor 1 and the second motor 5 The compensation positioning platform 2, the first motor 1 and the second motor 5 are respectively installed on the base 4 through the ...
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The invention provides a superspeed precision positioning tandem one-dimensional platform comprising a base, first and second motors serially connected with each other, and a compensation positioning platform driven by the first and second motors. The first and second motors are installed on the base respectively through shock absorbers. The compensation positioning platform comprises a positioning platform, a platform base fixedly connected with the base, and a flexible platform connected with the platform base through a first guide rail. The flexible platform is provided with a piezoelectric actuator and a flexible hinge connected with the piezoelectric actuator. The positioning platform is disposed on the flexible platform and connected with the flexible hinge. Motion measurement grating rulers are disposed on two sides of the platform base. Through the application of the superspeed precision positioning tandem one-dimensional platform, the problem that the prior art fails to break through higher acceleration in precision positioning is solved.
Description
technical field [0001] The invention relates to a platform, in particular to a series ultra-high-speed precise positioning one-dimensional platform. Background technique [0002] With the rapid development of precision engineering such as ultra-precision machining and microelectronics manufacturing, the importance of long-stroke ultra-precision positioning as a key positioning equipment has become increasingly prominent, especially in the fields of microelectronics such as lithography and bonding, equipment needs to do high-speed The precise positioning movement of the platform in the state. At present, the high-speed motion of the positioning platform has been developed to the limit, which restricts the improvement of the production efficiency of the positioning platform. Under the condition of meeting the predetermined accuracy, improving the speed and acceleration of the platform, shortening the machining time, and effectively improving the productivity is the developmen...
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Login to View More IPC IPC(8): F16M11/18F16F15/02F16F15/04G12B5/00
Inventor 张璐凡隆志力方纪文念龙生李泽湘
Owner GUANGDONG HUST IND TECH RES INST