Fixing device for transmission electron microscope sample

A transmission microscope and fixing device technology, applied in the preparation of test samples, measuring devices, material analysis by optical means, etc., can solve the problems of copper sheet 1 deformation, sample loss, screw slippage, etc., and increase the service life. , Improve the effect of stress deformation and stable fixation

Active Publication Date: 2014-03-19
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the frequency of use of the screw and the copper sheet 1 is relatively high, the screw is prone to slippage due to wear and tear, and the copper sheet 1 will also be deformed due to the hard contact when it is...

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  • Fixing device for transmission electron microscope sample
  • Fixing device for transmission electron microscope sample
  • Fixing device for transmission electron microscope sample

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Embodiment Construction

[0019] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements well known to those skilled in the art are also covered by the protection scope of the present invention.

[0020] The fixing device of the transmission microscope sample of the present invention will be described in detail below with reference to specific embodiments. The fixing device of the present invention is used to fix the sample to be tested for TEM detection. Generally speaking, the copper mesh has a carbon film, and the sample to be tested is adhered to the carbon film, and the copper mesh carrying the sample to be tested is placed in the sample rod for TEM detection. The fixing device of the present invention realizes fixing the sample to be tested by fixing th...

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Abstract

The invention discloses a fixing device for a transmission electron microscope sample. The fixing device comprises a metal sheet, an elastic piece and a fastening piece, wherein the metal sheet consists of a thin sheet part and a hollow annular fixing part which are connected with each other; the end part of a thin sheet is used for fixing a metal net; the inner wall of the annular fixing part is provided with an annular step; the elastic piece is arranged on the annular step; the fastening piece comprises a first fixing element and a second fixing element; the first fixing element is used for fixing the annular fixing part on the second fixing element through the elastic piece. According to the fixing device disclosed by the invention, direct contact of the first fixing element of the fastening piece and the metal sheet is avoided, so that the problem of stressed deformation of the metal sheet is solved.

Description

Technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a fixing device for a transmission electron microscope sample. Background technique [0002] With the development of IC (Integrated circuit) industry, TEM (Transmission Electron Microscope) has evolved into an indispensable analytical research tool. The size of the device is getting smaller and smaller, and the Defect (defect) that affects the performance of the device will be correspondingly smaller and smaller, so the resolution requirements for the analysis tool will naturally become higher and higher. The high resolution and high accuracy of the TEM machine itself makes its role in FA (failure analysis) and process monitoring more and more obvious. [0003] Before shooting the TEM sample, it is necessary to put the copper mesh with the TEM sample into the sample rod, and then fix the copper mesh on the sample rod with the fixing device. figure 1 with figure 2 Shown i...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N1/36
Inventor 孙凤勤陈强高林高金德
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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