Fixtures for TEM samples

A transmission microscope and fixing device technology, applied in the preparation of test samples, measuring devices, material analysis by optical means, etc., can solve the problems of copper sheet 1 deformation, screw slippage, waste of time, etc., and increase the service life. , Improve the effect of stress deformation and stable fixation
CN103645138BActive Publication Date: 2016-09-07SHANGHAI HUALI MICROELECTRONICS CORP
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI HUALI MICROELECTRONICS CORP
Publication Date
2016-09-07

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Abstract

The invention discloses a fixing device for a transmission microscope sample, which comprises a metal sheet, an elastic piece and a fastening piece. The metal piece is composed of connected sheet parts and a hollow ring-shaped fixing part; the end of the sheet is used to fix the metal mesh, and the inner wall of the ring-shaped fixing part has a ring-shaped step; the elastic part is arranged on the ring-shaped step; the fastener includes the first A fixing element and a second fixing element, the first fixing element fixes the annular fixing component on the second fixing element through an elastic piece. The invention avoids the direct contact between the first fixing element of the fastener and the metal sheet, and improves the problem of deformation of the metal sheet under force.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor testing, in particular to a fixing device for transmission electron microscope samples. Background technique

[0002] With the development of IC (Integrated circuit) industry, TEM (Transmission Electron Microscope) has evolved into an indispensable analysis and research tool. The size of the device is getting smaller and smaller, and the accompanying Defect (defect) that affects the performance of the device will be correspondingly smaller and smaller, so the requirements for the resolution of the analysis tool will naturally become higher and higher. The TEM machine itself has the advantages of high resolution and high precision, making its role in FA (failure analysis) and process monitoring more and more obvious.

[0003] Before photographing the TEM sample, it is necessary to put the copper grid carrying the TEM sample into the sample rod, and then fix the copper grid on the sample rod ...

Claims

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