Fixtures for TEM samples

A transmission microscope and fixing device technology, applied in the preparation of test samples, measuring devices, material analysis by optical means, etc., can solve the problems of copper sheet 1 deformation, screw slippage, waste of time, etc., and increase the service life. , Improve the effect of stress deformation and stable fixation

Active Publication Date: 2016-09-07
SHANGHAI HUALI MICROELECTRONICS CORP
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the frequency of use of the screw and the copper sheet 1 is relatively high, the screw is prone to slippage due to wear and tear, and the copper sheet 1 will also be deformed due to the hard contact when it is often squeezed by the screw cap
If the copper grid carrying the sample is not well fixed on the sample holder, the sample may be lost during the shooting process, which will cause economic loss and waste time for no reason

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Fixtures for TEM samples
  • Fixtures for TEM samples
  • Fixtures for TEM samples

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.

[0017] The fixing device for a transmission microscope sample of the present invention will be described in detail below in conjunction with specific examples. The fixing device of the present invention is used for fixing the sample to be tested for TEM detection. Generally speaking, there is a carbon film on the copper grid, and the sample to be tested is adhered to the carbon film, and the copper grid carrying the sample to be tested is placed in the sample holder for TEM detection. However, the fixing device of the present invention realizes fixing the sample t...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a fixing device for a transmission microscope sample, which comprises a metal sheet, an elastic piece and a fastening piece. The metal piece is composed of connected sheet parts and a hollow ring-shaped fixing part; the end of the sheet is used to fix the metal mesh, and the inner wall of the ring-shaped fixing part has a ring-shaped step; the elastic part is arranged on the ring-shaped step; the fastener includes the first A fixing element and a second fixing element, the first fixing element fixes the annular fixing component on the second fixing element through an elastic piece. The invention avoids the direct contact between the first fixing element of the fastener and the metal sheet, and improves the problem of deformation of the metal sheet under force.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a fixing device for transmission electron microscope samples. Background technique [0002] With the development of IC (Integrated circuit) industry, TEM (Transmission Electron Microscope) has evolved into an indispensable analysis and research tool. The size of the device is getting smaller and smaller, and the accompanying Defect (defect) that affects the performance of the device will be correspondingly smaller and smaller, so the requirements for the resolution of the analysis tool will naturally become higher and higher. The TEM machine itself has the advantages of high resolution and high precision, making its role in FA (failure analysis) and process monitoring more and more obvious. [0003] Before photographing the TEM sample, it is necessary to put the copper grid carrying the TEM sample into the sample rod, and then fix the copper grid on the sample rod ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/01G01N1/36
Inventor 孙凤勤陈强高林高金德
Owner SHANGHAI HUALI MICROELECTRONICS CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap