A macro and micro drive power supply for a linear drive and its control method

Abstract

The invention discloses a macro-micro driving power supply of a linear driver and a control method of the macro-micro driving power supply. The macro-micro driving power supply comprises a control circuit, a voltage conversion circuit, an amplifying circuit, a half-bridge module and an optically-coupled isolation driving circuit. The control circuit is used for processing signals input by a system and then sending generated control signals to the amplifying circuit and the optically-coupled isolation driving circuit. The voltage conversion circuit is used for outputting direct currents, with various amplitudes, needed by the system. The amplifying circuit is used for outputting a direct-current high voltage, with adjustable amplitude, needed by the half-bridge module. The half-bridge module comprises three half-bridge topological structure circuits composed of six IGBTs and works in a macro driving state or a micro driving state according to driving signals sent by the optically-coupled isolation driving circuit, wherein when the half-bridge module works in the macro driving state, a high-frequency high-voltage alternating current is output, and when the half-bridge module works in the micro driving state, a high-voltage direct current is output. According to the macro-micro driving power supply of the linear driver and the control method of the macro-micro driving power supply, integration of an ultrasonic transducer driving power supply and a piezoelectric ceramic driving power supply is achieved, both direct currents and alternating currents can be output, and the frequency and amplitude of the output currents can be adjusted.

Description

technical field [0001] The invention relates to the field of ultrasonic power supply research, in particular to a macro-micro drive power supply of a linear driver and a control method thereof. Background technique [0002] At present, the accuracy of large stroke drives and transmissions (precision screw drives, linear motors, voice coil motors, etc.) is generally limited to the micron level. The positioning accuracy of micro-drivers represented by piezoelectric ceramic micro-drivers can reach the nanometer level, but the stroke can only reach tens of microns. How to better realize the precise positioning of large-travel and high-speed mechanical motion systems has become an urgent problem to be solved. [0003] Most of the existing high-resolution linear propulsion motions are completed by electromagnetic motors. Generally, the linear motion is obtained by means of the rotary motion of the rotary motor, coupled with the ball screw, and the micro-motion table is added. How...

AI Technical Summary

Problems solved by technology

[0007] The main purpose of the present invention is to overcome the shortcomings and deficiencies of the prior art, and provide a macro-micro drive power supply for linear drives, which solves the problem that traditional ultrasonic transducers and piezoelectric micro-drivers cannot share the drive power supply, and realizes ultrasonic The transducer drive power supply and piezoelectric ceramic drive power supply are integrated, and its output has the characteristics of variable AC and DC, adjustable frequency, amplitude and phase, etc.

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