Prism-type ring laser light path coplanarity detection system
A ring laser and detection system technology, applied in the direction of testing optical performance, etc., can solve the problems that the influence is difficult to eliminate, the prism and cavity processing tower are difficult to detect, etc., and achieve the effect of strong resolution and convenient verification work.
Inactive Publication Date: 2014-04-09
西安北方捷瑞光电科技有限公司
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[0003] The purpose of the present invention is to provide a prism-type ring laser optical path coplanarity detection system to solve the technical problem that the prism and cavity processing tower difference is difficult to detect and its influence is difficult to eliminate during the laser assembly process, so as to realize the detection of this kind of Effective control of laser assembly quality with high work stability requirements
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[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0021] figure 1 A schematic diagram of the optical path of a prism laser. see figure 2 As shown, the present invention is a prism-type ring laser optical path coplanarity detection system, including: external source frequency-stabilized laser 1, semi-reflective, semi-transmissive mirrors 2, 7, prism-type ring resonator 3, total reflection prism 4, Diffraction auxiliary aperture 5, total reflection mirror 6, CCD detector 8, optical power meter 9 and base.
[0022] A prism-type ring resonator 3 to be checked is fixed on the base, and a mirror surface corresponding to the laser beam 10 emitted by the external source frequency-stabilized laser 1 is arranged at 45° along one angle of the prism-type ring resonator 3 to be checked. The semi-reflective and semi-transmissive mirror a2 is provided with three total reflection prisms 4 capable of reflecting the outgo...
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The invention discloses a prism-type ring laser light path coplanarity detection system. The system comprises a to-be-detected prism-type ring resonator fixed on a base, semi-reflective and semi-transmissive mirrors corresponding to an emergent laser beam of an exogenous frequency-stabilized laser are arranged along one corner of the prism-type ring resonator, three total-reflection prisms capable of reflecting the emergent laser beam are additionally arranged, and a diffraction assisting diaphragm is additionally arranged on the outer side of any of the three total-reflection prisms. A total-reflection mirror is arranged in a horizontal position of a laser beam reflected by the semi-reflective and semi-transmissive mirror a, and the semi-reflective and semi-transmissive mirror b is arranged at the vertical intersection point of a laser beam reflected by one total-reflection prism and a laser beam reflected by the total-reflection mirror. A laser beam reflected by the semi-reflective and semi-transmissive mirror b is correspondingly provided with an optical power meter, and a laser beam transmitted by the semi-reflective and semi-transmissive mirror b is correspondingly provided with a CCD detector. The system can carry out high-precision detection on the coplanarity of a four-prism resonator optical path and can meet the requirement on an accurate, effective and intuitive test result.
Description
technical field [0001] The invention relates to the technical field of precision assembly, in particular to a prism-type ring laser optical path coplanarity detection system. Background technique [0002] For the coherent detection laser light source with high performance and stability requirements - prism ring laser, the coplanarity of the optical path is directly related to the stability of the laser's performance during operation. This kind of laser has high requirements on the accuracy of the angular size of the resonant cavity and the prism attached to the corresponding position of the resonant cavity. Generally, the tower difference of the cavity or prism for tens of seconds is enough to cause poor effects. Since it involves the measurement of microscopic dimensions, direct measurement very difficult. For this reason, a new detection scheme is designed according to the principle of laser interference, that is, through the distribution of the energy of the interference...
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IPC IPC(8): G01M11/02
Inventor 刘健宁钟聪屈波
Owner 西安北方捷瑞光电科技有限公司