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Resonant acceleration sensor device

An acceleration sensor and acceleration sensing technology, applied in the field of inertial navigation, can solve the problems of low excitation efficiency of single-sided electrodes, difficult electrode patterning, large dynamic impedance, etc., so as to overcome weak oscillation energy, reduce manufacturing difficulty and excitation efficiency. improved effect

Active Publication Date: 2016-07-13
CHINA ELECTRONICS TECH GRP NO 26 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the thickness of the vibrating beam of the quartz beam accelerometer of France Onera is very small, and the back is made after wet etching deep grooves. It is difficult to pattern the electrodes. The electrodes excite the vibrating beam, but the excitation efficiency of the single-sided electrode is low, the dynamic impedance of the vibrating beam is large when it resonates, and the stability is poor

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] As a preferred embodiment of the present invention, such as Figure 2a As shown, the grooves on the front of the first vibrating beam 22 and the second vibrating beam 24 are three-the middle groove between the end grooves at both ends and the end grooves, the end groove and the middle groove The demarcation point coincides with the nodes (P1, P2, P3, P4) when the vibrating beam resonates, so as to improve the electrode excitation efficiency and resonance stability. The second excitation electrodes on the two side walls of the vibrating beam are divided into three corresponding independent sections to correspond to the first excitation electrodes inside the groove.

[0034] Such as Figure 2b and 2c As shown, the first excitation electrode on the inner wall of the groove at the end of the same vibrating beam is opposite to the polarity of the connection between the first excitation electrode on the inner wall of the middle groove and the excitation power supply. ...

Embodiment 2

[0037] Such as image 3 As shown, the difference between Embodiment 2 and Embodiment 1 is only that the fronts of the first vibrating beam 22 and the second vibrating beam 24 are provided with only middle grooves and no end grooves, that is, there is only one groove.

[0038] When the length of the vibrating beam is further shortened, if the front of the vibrating beam is made with the middle groove and the end groove at the same time, the difficulty of electrode patterning on the surface will increase, and the probability of short circuit between the first excitation electrode 26 and the second excitation electrode 27 will increase. Both the yield and the reliability of the manufacture of the resonant acceleration sensor device will be reduced. The vibrating beam structure in this embodiment is more suitable for the manufacture of resonant acceleration sensor devices with shorter vibrating beams.

Embodiment 3

[0040] Such as Figure 4 As shown, the difference between Embodiment 3 and Embodiment 1 is that the end grooves and the middle grooves on the front of the first vibrating beam 22 and the second vibrating beam 24 are integrated, and no excitation is made in the end grooves. electrode. To highlight the structural shape, Figure 4 Electrode patterns are not shown.

[0041] When the length of the vibrating beam is short, the boundary between the middle groove and the end groove on the front of the vibrating beam (near the node without groove) will greatly increase the influence on the excitation efficiency, reducing the resonance strength of the vibrating beam. By integrating the end groove and the middle groove on the front of the vibrating beam, the influence of the boundary on the excitation efficiency can be effectively reduced, and the resonance strength of the vibrating beam can be improved.

[0042] It can be seen that a groove is made on the front of the vibratin...

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Abstract

The invention discloses a resonant acceleration sensor device, which comprises a resonant sensitive element, a U-shaped mass block, a first flexible bridge, a second flexible bridge, a C-shaped connecting block, a connecting beam, an annular connecting block, and a first fixed block and the second fixed block. The resonance sensitive element is composed of a first base, a second base, and a first vibrating beam and a second vibrating beam fixed between the two. The two vibrating beams are provided with a rectangular groove on the front, and the opening direction of the groove is in line with the The vibration directions of the two vibrating beams are vertical, the inner wall of the groove is covered with the first exciting electrode, the two side walls of the vibrating beam are respectively covered with the second exciting electrode, the first vibrating beam and the second vibrating beam pass through the connection between the electrodes and the exciting power supply. The connection makes the two vibrate in opposite directions. The invention is beneficial to the miniaturization of the device, can effectively improve the resonance stability of the vibrating beam, has higher sensitivity of the device, and reduces the difficulty of making the electrode at the same time.

Description

technical field [0001] The invention relates to a frequency output resonant acceleration detection technology, in particular to a resonant acceleration sensor, which belongs to the technical field of inertial navigation. Background technique [0002] As an autonomous navigation method, inertial navigation has strong concealment and anti-interference, and is widely used in weaponry and civilian consumer electronics. Accelerometers and gyroscopes are the core sensitive components of inertial navigation, and their accuracy will have a decisive impact on navigation accuracy. The resonant accelerometer uses the principle of resonance to detect acceleration, and has many advantages such as frequency output and high detection accuracy. The resonant accelerometer based on quartz material has better stability than other materials, and it has been more and more used in the field of high-precision acceleration detection. . [0003] Quartz resonant accelerometer with vibrating beam st...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/097
Inventor 林丙涛林日乐翁邦英
Owner CHINA ELECTRONICS TECH GRP NO 26 RES INST
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