Resist stripper regeneration methods and devices

Abstract

Provided are resist stripper regeneration methods and devices. Resist components are solid organic matters at normal temperatures and are solidified for adhesion when the temperatures on the periphery of the inlet and outlet of a residue concentrator drops. The regeneration methods for regenerating a resist stripper include a step of low boiling point separation to separate low boiling point substances such as water; a step of high boiling point separation to take out a residual liquid including a resist and a solvent as outliers; a residue concentration process, in which the residual liquid including a resist is further concentrated in the residue concentrator to separate the solvent and to return to the high boiling point separation step; a refining process, in which the separated substances in the high boiling point separation step gasifies and separates the water, the residual part being used as a waste liquid B, and the separated residual liquid is taken out as a stripping regeneration liquid; and a cleaning process, in which the separation residual liquid in the low boiling point separation step flows in the residue concentrator.

Description

technical field [0001] The present invention relates to a regeneration method for separating solvent components from used resist stripping liquid and regenerating the used resist stripping liquid, in particular to a method for concentrating resist-containing liquid from a high boiling point separator. A method and apparatus for regenerating a resist stripping liquid that is less prone to deposits in the residue concentrator and piping of the residual liquid. Background technique [0002] Photolithography is often used in the manufacture of semiconductors, liquid crystal displays, and organic and inorganic EL displays. Here, a thin film of material is formed on a substrate, on which a pattern is formed with a resist. Next, etching is performed along this resist pattern to form a material thin film into a desired pattern. Next, the last remaining resist is stripped. [0003] The resist is a photosensitive resin material, and for example, a novolak resin or the like can be u...

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Problems solved by technology

[0004] These solvents are used in large quantities and are by no means cheap

In addition, from the viewpoint of recycling, it is the most effective method to separate and recycle the individual solvent components, but in terms of cost, it is not practical to separate and refine individual solvent components so that they can be reused. method

Usually, the used resist stripping solution is often used as a combustion aid, but it may contain moisture, so it is costly to decompose it by burning it in order to use it in large quantities

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