Precise adjustment system for vacuum degree of giant vacuum chamber
A technology of regulating system and vacuum chamber, applied in the direction of machine/engine, etc., can solve the problems of lack of automation, small laboratory volume, inability to meet the requirements of extra-large vacuum system, etc., and achieve the effect of stable regulation and wide application range.
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[0024] Figure 1~5 It is the best embodiment of the present invention, below in conjunction with attached Figure 1~5 The present invention will be further described.
[0025] Such as figure 1 Shown, the volume of the vacuum chamber 9 of the precise adjustment system of the vacuum degree of the giant vacuum chamber of the present invention can reach 12000m 3 ~15000m 3 A plurality of vacuum chamber pressure transmitters 1 are installed on the vacuum chamber 9, and the main vacuum pipeline 5 is drawn out from the vacuum chamber 9 side. In the main vacuum pipeline 5, a main pipeline pressure gauge 2, a main pipeline pressure transmitter 3 and a main pipeline switch valve 4 are connected in series in sequence, and then a group of maintaining vacuum pumping units 8 and two sets of main vacuum pumping units 7 are connected in parallel at the same time. One or more sets of vacuum pumping units 7 can be arranged as required, and an air supply unit 6 is connected in parallel betwee...
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