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Precise adjustment system for vacuum degree of giant vacuum chamber

A technology of regulating system and vacuum chamber, applied in the direction of machine/engine, etc., can solve the problems of lack of automation, small laboratory volume, inability to meet the requirements of extra-large vacuum system, etc., and achieve the effect of stable regulation and wide application range.

Active Publication Date: 2015-04-15
ZIBO WATER RING VACUUM PUMP FACTORY
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Problems solved by technology

[0002] In the prior art, many scientific experiments need to be carried out in a vacuum environment, but the similar vacuum laboratories of the prior art generally have the following defects: 1, the volume of the laboratory is small (generally only 10 ~ 30m 3 ), unable to meet the requirements of the research on the extra-large vacuum system; 2. The control accuracy is not high; 3. The automation of the process has not been realized

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  • Precise adjustment system for vacuum degree of giant vacuum chamber
  • Precise adjustment system for vacuum degree of giant vacuum chamber
  • Precise adjustment system for vacuum degree of giant vacuum chamber

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Embodiment Construction

[0024] Figure 1~5 It is the best embodiment of the present invention, below in conjunction with attached Figure 1~5 The present invention will be further described.

[0025] Such as figure 1 Shown, the volume of the vacuum chamber 9 of the precise adjustment system of the vacuum degree of the giant vacuum chamber of the present invention can reach 12000m 3 ~15000m 3 A plurality of vacuum chamber pressure transmitters 1 are installed on the vacuum chamber 9, and the main vacuum pipeline 5 is drawn out from the vacuum chamber 9 side. In the main vacuum pipeline 5, a main pipeline pressure gauge 2, a main pipeline pressure transmitter 3 and a main pipeline switch valve 4 are connected in series in sequence, and then a group of maintaining vacuum pumping units 8 and two sets of main vacuum pumping units 7 are connected in parallel at the same time. One or more sets of vacuum pumping units 7 can be arranged as required, and an air supply unit 6 is connected in parallel betwee...

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Abstract

The invention discloses a precise adjustment system for the vacuum degree of a giant vacuum chamber, and belongs to the field of vacuum equipment control. The precise adjustment system for the vacuum degree of the giant vacuum chamber comprises a vacuum chamber (9), and is characterized in that a vacuum main pipeline (5) is led out from the vacuum chamber (9); the vacuum main pipeline (5) is connected in series with a main pipeline monitoring control unit and then is simultaneously connected in parallel with a vacuum maintenance air pumping machine unit (8) and main vacuumizing machine units (7); an air supplement unit (6) is connected in parallel between the vacuum maintenance air pumping machine unit (8) and each main vacuumizing machine unit (7) simultaneously; the main pipeline monitoring control unit, the air supplement unit (6), the main vacuumizing machine units (7) and the vacuum maintenance air pumping machine unit (8) are controlled by a control system. The precise adjustment system for the vacuum degree (the pressure range is that the absolute pressure is 100 kPa to 2 kPa) of the giant vacuum chamber disclosed by the invention aims at the giant vacuum chamber, and the pressure can be adjusted automatically, so that the vacuum degree in the vacuum chamber is constant.

Description

technical field [0001] The invention relates to an accurate adjustment system for the vacuum degree of a giant vacuum chamber, which belongs to the field of vacuum equipment control. In particular, it relates to a pressure regulating system for evacuating a giant vacuum chamber. Background technique [0002] In the prior art, many scientific experiments need to be carried out in a vacuum environment, but the similar vacuum laboratories of the prior art generally have the following defects: 1, the volume of the laboratory is small (generally only 10 ~ 30m 3 ), unable to meet the requirements of the research on the extra-large vacuum system; 2. The control accuracy is not high; 3. The automation of the process has not been realized. Contents of the invention [0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a 3 ~15000m 3 The giant vacuum chamber can automatically adjust the pressure to realize...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04C28/02
Inventor 陈维茂燕洪顺马新华刘勋涛孙向东荆延波宋文玲孟凡瑞
Owner ZIBO WATER RING VACUUM PUMP FACTORY
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