Low vacunm bonding method of polydimethylsiloxane chip

A polydimethylsiloxane, low-vacuum technology, applied in biochemical equipment and methods, material inspection products, instruments, etc., can solve the problems of high chip temperature, easy damage to the chemical composition of the chip surface, and impact on chip performance, etc. To achieve the effect of simple equipment
CN1484021AInactive Publication Date: 2004-03-24XIAMEN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
XIAMEN UNIV
Publication Date
2004-03-24
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention refers to a low-vacuum bonding method for a polydimethylsiloxane chip, its steps: freshly peel off the polymerized silicon latex sample to obtain chip subassembly, place in vacuum cavity, vacuumize, wash by oxygen again and again, and eliminate the remnant gas; vacuumize again, exert high pressure to make the oxygen light up in the vacuum cavity, to make oxygen plasm bombardment on the chip subassembly's surface, the air pressure equal to the atmospheric pressure, open the vacuum cavity, and joint the chip subassembly. It has very high bonding intensity, able to surpass that of PDMS noumenon.
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Description

(1) Technical field

[0001] The invention relates to a low-vacuum bonding method, in particular to a low-vacuum bonding method for polydimethylsiloxane chips. (2) Background technology

[0002] Microfluidic chip (microfluidic chip) has a broad application prospect in the fields of analysis system, biomedicine, chemistry and biochemistry. The traditional microfluidic chip follows the IC industrial technology, and mainly uses silicon and glass as materials; therefore, it must go through a series of processes such as mask making, photolithography, and microchannel etching. The manufacturing process is complex, the cycle is long, and the efficiency is high. It is relatively low, and the sidewalls of microfluidic channels etched on such hard materials are difficult to be both smooth and steep. However, using high molecular polymers as materials to make microfluidic chips can overcome the above difficulties, thereby realizing low-cost, high-volume, and high-efficiency manufacturin...

Claims

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