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Electronic shutter for ultraviolet LED (Light Emitting Diode) exposure machine

An electronic shutter and exposure machine technology, applied in microlithography exposure equipment, photolithographic process exposure devices, etc., can solve problems such as high energy consumption, achieve breakthroughs in limited service life, improve yield and product quality, and shorten switching time. Effect

Active Publication Date: 2014-04-16
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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Problems solved by technology

3. The existing mechanical shutter cuts off the light by shading, but does not actually turn off the light source. The light source is kept on during the working period, so it will generate high energy consumption

Method used

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  • Electronic shutter for ultraviolet LED (Light Emitting Diode) exposure machine

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Embodiment Construction

[0021] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings; it should be understood that the preferred embodiments are only for illustrating the present invention, rather than limiting the protection scope of the present invention.

[0022] Such as figure 1 As shown, an electronic shutter of an ultraviolet LED exposure machine that can automatically adjust the exposure intensity or exposure dose is composed of a diagram. The electronic shutter includes an exposure intensity setting module, an exposure time setting module, a light intensity temperature detection module, a central control module, a light intensity adjustment module, and a host computer communication module.

[0023] The function of the exposure intensity setting module is to set the preset value of the exposure intensity as required before the exposure light source is started. The preset value can be adjusted by pressing the button, ...

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Abstract

The invention discloses an electronic shutter for an ultraviolet LED (Light Emitting Diode) exposure machine. The electronic shutter is characterized by comprising an exposure intensity setting module, an exposure time setting module, a light intensity and temperature detection module, a center control module, a light intensity adjusting module and an upper computer communication module. According to the electronic shutter, the intensity of light sent by an exposure light source is adjusted in real time by detecting the light intensity and temperature, feeding back the light intensity and temperature and adjusting the light intensity, so that the intensity of the light sent by the exposure light source is extremely stable, and the rate of finished products and the product quality of machined workpieces are improved. The electronic shutter is used for taking the place of a mechanical shutter, so that the switch time of the exposure light source is shortened, the exposure amount is controlled more accurately on the aspect of time, and the bottle neck that the service life of the mechanical shutter is limited is also broken through.

Description

technical field [0001] The patent of the present invention belongs to the technical field of automatic control and optoelectronic application, and in particular relates to an electronic shutter used in an ultraviolet LED exposure machine. Background technique [0002] An exposure machine refers to a device that transfers image information on a film or other transparent body to a surface coated with a photosensitive substance by turning on the light to emit ultraviolet rays. [0003] At present, most ultraviolet exposure machines on the market use mechanical shutters to control the exposure light source. The mechanical shutter mainly consists of three parts: a driving air bag, an exposure shutter plate, and a buffer spring. When the light source needs to be turned off, the control device sends a signal to the driving air bag, which inflates rapidly and drives the exposure shutter plate, so that the shutter of the exposure machine is quickly closed to achieve the purpose of s...

Claims

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Application Information

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IPC IPC(8): G03F7/20
Inventor 尹韶云李任远苟健孙秀辉杨正吴鹏杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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