Semiconductor device and manufacturing method thereof
A semiconductor and device technology, applied in the field of semiconductor devices and their preparation, can solve the problems of easy generation of bubbles and voids, difficulty in filling dielectrics, and difficulty in controlling the height of fins, and achieves easy filling, high electron mobility and driving current. Better than the filling effect
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[0044] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.
[0045] For a thorough understanding of the present invention, a detailed description will be presented in the following description to illustrate the semiconductor device and the method of manufacturing the same according to the present invention. Obviously, the practice of the invention is not limited to specific details familiar to those skilled in the semiconductor arts. Preferred embodiments of the present invention are described in detail below, however, the present invention may have other embodiments besides these detailed descriptions.
[0046] It shou...
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