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A graphene-based mercury cadmium telluride composite film material and preparation method thereof

An alkenyl cadmium telluride and composite thin film technology, which is applied in the fields of final product manufacturing, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc., can solve the problems of restricting the development of mercury cadmium telluride FPA devices, high quality requirements, and poor stability , to achieve the effect of easy processing, large area and stable properties

Inactive Publication Date: 2016-05-11
SHANDONG NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, various hard single crystal substrate materials commonly used at present cannot meet these requirements at the same time, which greatly limits the development of HgCdTe FPA devices. Key issues for further improvement of film quality, properties and performance

Method used

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  • A graphene-based mercury cadmium telluride composite film material and preparation method thereof
  • A graphene-based mercury cadmium telluride composite film material and preparation method thereof
  • A graphene-based mercury cadmium telluride composite film material and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0030] (1) Preparation of graphene

[0031] Put the copper foil into a vacuum chemical vapor deposition (CVD) system composed of a high-temperature tube furnace and a compound molecular pump, pump the system to below 10Pa, and start heating up. When the temperature rises to 300°C, H is introduced into the 2 (Flow rate 50sccm), continue to heat up to 1050°C, keep the temperature for 20 minutes and then pass CH 4 (Flow 50sccm), after 50 minutes of ventilation, turn off CH 4 , after keeping the constant temperature for 15 minutes, turn off the H 2 , followed by rapid cooling to obtain single-layer graphene.

[0032] (2) Using wet transfer technology to transfer single-layer graphene to amorphous glass substrate

[0033] The specific operation is: cut the copper foil deposited with graphene into a 15mm*15mm square, and evenly spin-coat PMMA on one side, then place it on a heating plate at 130°C for 30 minutes, and then put 1mol / l FeCl 3 Soak in the solution at room temperatu...

Embodiment 2

[0038] (1) Put the copper foil into a vacuum chemical vapor deposition (CVD) system composed of a high-temperature tube furnace and a compound molecular pump, pump the system airtightly below 10Pa, and start heating up. When the temperature rises to 300°C, H is introduced into the 2 (Flow rate 50sccm), continue to heat up to 1050°C, keep the temperature for 20 minutes and then pass CH 4 (Flow 50sccm), after 50 minutes of ventilation, turn off CH 4 , after keeping the constant temperature for 15 minutes, turn off the H 2 , followed by rapid cooling to obtain single-layer graphene.

[0039](2) Using wet transfer technology to transfer multi-layer graphene to amorphous glass substrate

[0040] The specific operation is: cut the copper foil deposited with graphene into multiple 15mm*15mm squares, and evenly spin-coat PMMA on one side, then place it on a heating plate at 130°C for 30 minutes, and then put 1mol / l FeCl 3 Soak in the solution at room temperature until the graphe...

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PUM

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Abstract

The invention relates to a grapheme-based Hg1-xCdxTe laminated film material and a preparation method thereof. The grapheme-based Hg1-xCdxTe laminated film material comprises a substrate layer, wherein one or more grapheme layers are arranged on the substrate layer, a Hg1-xCdxTe film layer is deposited on the grapheme layer, and x in the Hg1-xCdxTe is larger than or equal to 0.2 and smaller than or equal to 0.3. A chemical vapor deposition (CVD) method is utilized to prepare one grapheme film layer on a copper foil, the grapheme layer is transferred onto the required substrate layer through a wet method, and the Hg1-xCdxTe film is deposited on the grapheme layer through a laser molecular beam epitaxy (LMBE) method. Substrates of the grapheme-based Hg1-xCdxTe laminated film material are diversified, and change of substrates does not cause change of property of the Hg1-xCdxTe film layer. The grapheme-based Hg1-xCdxTe laminated film material is high in transparency, good in electrical property and low in noise influence. Grapheme Layers can be controllable, and therefore, transparency, electrical conductivity, noise and response of the grapheme-based Hg1-xCdxTe laminated film material can be controlled and regulated well.

Description

technical field [0001] The invention relates to a graphene-based mercury cadmium telluride composite film material and a preparation method thereof, belonging to the technical field of infrared detection materials. Background technique [0002] Mercury Cadmium Telluride (Hg 1-x Cd x Te, MCT) material is a direct band gap semiconductor material, which has the characteristics of high quantum efficiency, high temperature operation, adjustable response wavelength with continuous change of composition, and detection of medium-wave, long-wave and ultra-long-wave infrared radiation. It has always been the third generation of infrared radiation. The main materials used in focal plane (FPA) detection devices are widely used in satellite remote sensing, meteorological and environmental monitoring, medical imaging and night vision systems. [0003] The early mercury cadmium telluride materials were mainly used to prepare single crystals. Due to the problems of uneven composition, poo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0296H01L31/18
CPCH01L21/02376H01L21/02411H01L21/02425H01L21/02527H01L21/7813H01L31/0336H01L31/1896Y02P70/50
Inventor 刘玫满宝元毕冬
Owner SHANDONG NORMAL UNIV
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