An Atmosphere Control System for Atomic Force Microscope

Abstract

The invention relates to an atmosphere control system for an atomic force microscope. The atmosphere control system is characterized in that a first gas bottle (1a) and a second gas bottle (1b) are respectively connected with a gas inlet of a mixed gas pipe (4) through a first flowmeter (3a) and a second flowmeter (3b), and a gas outlet of the mixed gas pipe (4) is connected with a gas inlet of an atmosphere cavity (7) in the atomic force microscope through a gas inlet cavity (6). According to the atmosphere control system, controlled mixed atmospheres composed of different gases according to various proportions can be provided for the atomic force microscope, simulation tests and studies on wear-out failures and protective mechanisms of a micro electro mechanical system under the mixed atmospheres composed of the different gases according to the various proportions can be carried out through the atomic force microscope, and accurate and reliable test data can be accordingly provided for designing, manufacturing and maintaining the micro electro mechanical system working under the corresponding mixed atmospheres, so that the wearing of the micro electro mechanical system is reduced, and the service life of the micro electro mechanical system is prolonged.

Description

technical field [0001] The invention relates to an accessory device of an atomic force microscope, in particular to an atmosphere control system for the atomic force microscope. Background technique [0002] The development of nanometer science and technology makes the development and application of microelectromechanical systems (MEMS) more and more extensive. The micro-electromechanical system (MEMS) structure is micron or even nano-scale. Due to surface and size effects, its contact pairs are easily damaged or even failed due to tribological problems such as adhesion, friction and wear. At present, the most commonly used equipment for studying nanotribology is the atomic force microscope. Since the radius of curvature of the probe is on the nanometer scale, by controlling its contact movement under different loads and observing and analyzing the deformation and damage on the surface of the sample in situ, the wear and tear of the MEMS can be studied. Protection mechanis...

AI Technical Summary

Problems solved by technology

The problem is that it can only realize the atmosphere environment with fixed components such as vacuum and air, but it cannot realize the measurement, adjustment and change of the mixed atmosphere and its ratio of any two or more gases; nor can it realize the mixed atmosphere. Measurement and regulation of humidity or alcohol vapor content

It cannot meet the simulation test and research on the wear failure and protection mechanism of MEMS under the mixed atmosphere of different gases, various proportions and different humidity or alcohol vapor content.

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