Solid-state image sensor

Abstract

A solid-state image sensor includes a semiconductor layer having photoelectric conversion portions, and a wiring structure arranged on a side of a first face of the semiconductor layer, and receives light from a side of a second face of the semiconductor layer. The wiring structure includes a reflection portion having a reflection surface reflecting light transmitted through the semiconductor layer from the second face toward the first face, toward the semiconductor layer, and an insulation film located between the reflection surface and the first face. The sensor includes a first dielectric film arranged to contact the first face, and a second dielectric film arranged between the insulation film and the first dielectric film and having a refractive index different from refractive indices of the first dielectric film and the insulation film.

Description

Technical field [0001] The present invention relates to a solid-state image sensor. Background technique [0002] U.S. Patent No. 7,755,123 describes the rear side irradiated imaging device in which the thickness of the substrate is reduced to allow the photosensor to easily detect light incident on the rear surface. Attached to this manual Figure 8 The rear side illumination imaging device described in FIG. 1C of U.S. Patent No. 7,755,123 is cited. The imaging device described in US Patent No. 7,755,123 includes a radiation reflector 128 that reflects photons incident on the rear surface of the semiconductor device substrate 104 and transmitted through the rear surface of the semiconductor device substrate 104 toward the photosensor 110. [0003] However, with the arrangement described in U.S. Patent No. 7,755,123, the front side 106f, which is the interfacial surface between the semiconductor device substrate 104 and the dielectric layer 118, is reflected toward the radiation re...

AI Technical Summary

Problems solved by technology

Also, when the distance between the interface 106f and the radiation reflector 128 is not uniform over the image sensing surface, the amount of photons returning to the photosensor 110 varies, thereby causing sensitivity variations

Images