Series connection device for vacuum pump pipelines

Abstract

The invention discloses a series connection device for vacuum pump pipelines. The series connection device comprises a heating device (A) and a series connection device body (B). A heating smelter, a pipeline, a vacuum pump (3) and an air valve are arranged on the heating device (A), and the series connection device body (B) is a main pipeline (1). The series connection device is characterized in that one end of the heating smelter is connected with the vacuum pump (3) through a pipeline A (5), and the other end of the heating smelter is connected with the main pipeline (1) through a pipeline B (7); the vacuum pump (3) is connected with the main pipeline through a pipeline C (9); one end of a pipeline D (11) is connected with external air, and the other end of the pipeline D (11) is connected with the pipeline C (9). The series connection device for the vacuum pump pipelines is good in energy-saving effect, capable of saving energy by more than 10 percent to 20 percent compared with a traditional operating mode, easy to operate and stable in operation.

Description

technical field [0001] The invention relates to a vacuum pumping device for a heating furnace, in particular to a vacuum pump pipeline series device. Background technique [0002] In the rapidly developing photovoltaic industry, high efficiency and low cost have always been the two main points of competition. Crystalline silicon is currently the main raw material for solar cells and is widely used in various silicon manufacturers. During the casting process of crystalline silicon, it is necessary to ensure that the heating furnace is in a vacuum state, and maintain a constant pressure in the furnace during the subsequent melting process. The constant pressure working time in the furnace accounts for 95% of the entire casting process. In the traditional casting process of crystalline silicon, each vacuum heating furnace will be equipped with a vacuum pump, which work independently between the mutual heating furnaces. During operation, the vacuum pump is turned on to draw out ...

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Problems solved by technology

[0004] 1. Patent document CN 201891568 U introduces a vacuum inflation device, which combines vacuum pumping and supplementary gas equipment. Although the waste of equipment is reduced, the maintenance rate will also increase due to the integration of functions.

[0005] 2. Patent document 200620108036.2 introduces a tandem atmospheric jet vacuum pump, which provides a tandem atmospheric jet that can be used in conjunction with the backing vacuum pump to increase vacuum, reduce noise, and reduce energy consumption without affecting the pumping speed Vacuum pumps, but they have not played a big role in reducing energy waste

[0006] 3. [Title] Vacuum pump cooler and refrigeration device series technology [Author] Zhu Yuqing [Organization] Huaneng Dandong Power Plant [Title] Electric Power Technology No. 74 [Abstract] Introduced the vacuum pump cooler used in the vacuum pumping system of modern thermal power units Combination technology with refrigeration units, although technology combination results in energy-saving applications, it is only suitable for laboratory production

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