Device and method for realizing small-angle X-ray diffraction function
An X-ray and functional technology, applied in the field of small-angle X-ray diffraction devices, can solve problems such as difficult debugging, high requirements for instrument assembly and operation skills, and difficulty in obtaining SAXRD spectra, achieving high cost performance and low cost , the effect of simple operation
Inactive Publication Date: 2014-05-21
HANGZHOU DIANZI UNIV
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Problems solved by technology
However, SAXRD still has high requirements for the assembly requirements and operation skills of the instrument
The price of a single SAXRD equipment is generally more than one million yuan, and debugging is very difficult. It is difficult for operators without professional training to obtain a perfect SAXRD spectrum
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[0022] A silicon dioxide film with different thicknesses was grown on a silicon wafer by dry oxygen oxidation process. attached figure 2 The small-angle X-ray diffraction curves collected by the ordinary X-ray diffractometer using the device and method proposed in this patent are given. Intensity oscillations due to interference effects can be clearly observed from the figure. from the formula It can be calculated that the thickness of the silicon dioxide layer in the sample is 3.5 nm, respectively. It can be seen that the lifting device and method of the sample stage proposed by us can fully realize the SAXRD function on an ordinary XRD spectrometer.
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Abstract
The invention discloses a device and a method for realizing a small-angle X-ray diffraction function. The device for realizing the small-angle X-ray diffraction function comprises an X-ray light source, an X-ray emitting slit, a sample platform, an X-ray receiving slit, an X-ray detector, a worm wheel and worm hoisting device and a stepping motor, wherein the X-ray light source, the sample platform and the X-ray detector are arranged in the same plane; the X-ray light source is provided with the X-ray emitting slit; the X-ray detector is provided with the X-ray receiving slit; the worm wheel and worm hoisting device is connected with the lower bottom face of the sample platform; the worm wheel and worm hoisting device is driven by the stepping motor. According to the device and the method for realizing the small-angle X-ray diffraction function, a common XRD (X-Ray Diffraction) diffractometer device is improved and a provided adjusting method of the sample platform, the X-ray light source and the detector is matched, so that the SAXRD (Small-Angle X-Ray Diffraction) function is realized on the common XRD diffractometer device at very low cost.
Description
technical field [0001] The invention relates to the analysis and testing technology of materials, in particular to a device and method for realizing the function of small-angle X-ray diffraction. Background technique [0002] Small-angle X-ray diffraction (SAXRD) is a material analysis and testing technique, which has important applications in the fields of nanomaterials, polymer materials, biological macromolecular materials and thin film materials. Different from the ordinary X-ray diffraction technique (XRD), SAXRD has higher requirements on the assembly requirements and operation skills of the instrument, and requires a stronger X-ray source due to the weaker signal. Therefore, early SAXRD was done on synchrotron radiation facilities. With the development of X-ray tube and weak X-ray detection technology, it is now possible to carry out SAXRD experiments in ordinary laboratories. However, SAXRD still has high requirements for instrument assembly and operation skills. ...
Claims
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IPC IPC(8): G01N23/207
Inventor 季振国席俊华刘永强
Owner HANGZHOU DIANZI UNIV