Method, system and device for control system simulation testing in semiconductor manufacturing process

A technology for control systems and manufacturing processes, applied in general control systems, control/regulation systems, electrical testing/monitoring, etc.

Active Publication Date: 2014-05-21
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0006] However, because in the semiconductor device manufacturing process, the test process involves multiple hardware devices, the test is very complicated
First of all: when testing, once a problem occurs, it is not easy to judge whether it is a hardware problem or a software problem; second: it is sometimes difficult to implement the fault tolerance test scenario for hardware device errors, and some of them are processing logic when the hardware is damaged. These are imp

Method used

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  • Method, system and device for control system simulation testing in semiconductor manufacturing process
  • Method, system and device for control system simulation testing in semiconductor manufacturing process
  • Method, system and device for control system simulation testing in semiconductor manufacturing process

Examples

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Example Embodiment

[0093] Example one:

[0094] As an implementable type, the first embodiment provides a simulation test method for a control system in a semiconductor manufacturing process, which is applied to a vacuum control system for controlling pumps, valves, and pressure gauges in a vacuum system in a semiconductor manufacturing process, including the following The steps described:

[0095] Step S201: Generate each simulation device corresponding to each semiconductor device (pump, valve, pressure gauge) in the vacuum system, and set the attribute information of each simulation device, the data type of the attribute information of each simulation device, and the vacuum machine where the vacuum control system is located The type of communication protocol with each analog device;

[0096] First, the vacuum system includes pumps, valves, and pressure gauges, which are turned on during normal operation. Specifically, take the pressure gauge as an example. Determine the attribute information of the...

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Abstract

The invention discloses a method, system and device for control system simulation testing in a semiconductor manufacturing process. The method comprises the steps of generating simulation devices; setting attribute information, data types and communication protocols of the simulation devices, setting parameters and communication instructions and simulation operations between the simulation devices, setting coupling conditions, and establishing a device simulation model according to the coupling conditions; carrying out the simulation operations in the simulation model, and obtaining test results. According to the method, system and device for control system simulation testing, testing efficiency is improved, and testing risks are reduced.

Description

technical field [0001] The invention relates to the field of semiconductor equipment manufacturing technology, in particular to a simulation test method, system and device of a control system for automatically controlling equipment in the semiconductor manufacturing technology. Background technique [0002] In the manufacturing process of semiconductor equipment, as the efficiency requirements and process requirements in the manufacturing process are getting higher and higher, people are increasingly using control systems to automatically control various processes in the manufacturing process. [0003] Among them, generally, the control system is responsible for controlling various hardware devices of the entire manufacturing process, and these hardware devices have different functions, different operation processes, and different communication methods and contents with the control system. [0004] The control system sends control instructions to each hardware device, and ea...

Claims

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Application Information

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IPC IPC(8): G05B23/02G05B17/02
Inventor 张京华
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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