Low-energy electron beam device
An electron beam device and low-energy technology, applied in the field of low-energy electron beam devices, can solve the problems of easy to be seriously offset, difficult to obtain and measure large dynamics, output parallel beams, etc., and achieve the goal of improving repeatability and operability Effect
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[0011] Such as figure 1 As shown, the low-energy electron beam device of the present invention includes an electron gun 1, a first unipotential lens 2, a second unipotential lens 4, and two grids 5 arranged in sequence with grids and extraction electrodes; two grids 5 A deceleration gap 6 is formed between them; two pairs of guide deflection plates 3 are arranged between the first and second single potential lenses, the first single potential lens is focused and imaged between the two pairs of deflection plates, and the second single potential lens The focal point of 4 is located at this imaging place.
[0012] Both the first unipotential lens 2 and the second unipotential lens 4 are three-cylindrical decelerating (or accelerating) unipotential lenses.
[0013] The advantages of the low-energy electron beam device of the present invention are as follows:
[0014] The energy range of the low-energy electron beam device described in this patent is 0.02-200keV, and the beam cur...
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