Vacuum filming workpiece rotation table

Abstract

The invention provides a vacuum filming workpiece rotation table. The vacuum filming workpiece rotation table comprises an object stage, the object stage comprises a rotation disc and a planetary gear, and the rotation disc is pivoted to the sun gear in the planetary gear through a ball. The rotating disc is directly pivoted to the planetary gear by using the ball, and the object stage has the advantages of simple structure, lightness and thinness.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a vacuum coating workpiece turntable. Background technique [0002] The service life of the workpiece mainly depends on the wear resistance and hardness, and the vacuum coating process is a common way to improve the wear resistance and hardness of the workpiece. In the vacuum coating process, the vacuum coating workpiece turntable plays an important role. [0003] The existing vacuum coating workpiece turntable usually includes a motor, a transmission base, a vacuum chamber and a stage. The motor drives the drive shaft in the transmission base to rotate through a transmission belt, and the drive shaft drives the stage to rotate. [0004] The existing vacuum coating workpiece turntable has the following problems: First, the thickness of the object stage is relatively large. Since the object stage includes a turntable and a planetary gear, the sun gear in the turntable and the planet...

AI Technical Summary

Problems solved by technology

[0004] The existing vacuum coating workpiece turntable has the following problems: First, the thickness of the object stage is relatively large. Since the object stage includes a turntable and a planetary gear, the sun gear in the turntable and the planetary gear is pivotally connected by a bearing, while the existing The size of the bearing is generally large, so the thickness of the stage cannot be further reduced; second, it is easy to deform at high temperature. Since the stage also includes a bearing sleeve and a rotation shaft, the rotation shaft and the bearing sleeve are directly pivoted. Deformation due to high temperature, causing the rotation shaft and the planetary gear of the planetary gear to be stuck; third, the transmission base and the stage are difficult to disassemble and separate, because the transmission base and the stage need to be locked by bolts to maintain continuous power supply

Therefore, when separating the loading platform and the transmission base, the bolt needs to be unscrewed and unloaded in advance, which is very inconvenient; fourth, the loading and unloading of the loading platform is inconvenient. When loading and unloading, the rotation axis needs to be accurately rotated to a fixed position, and then There is a problem of accurate positioning when the stage is assembled or unloaded

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