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Pressure sensor calibration method with temperature compensation function

A pressure sensor, temperature compensation technology, used in the measurement of fluid pressure, instruments, measuring devices, etc.

Active Publication Date: 2014-06-04
CHENGDU QIANJIA TECH CO LTD
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  • Abstract
  • Description
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Problems solved by technology

However, the existing calibration methods for pressure sensors with temperature compensation have not directly used zero drift and sensitivity drift to perform temperature compensation on pressure sensors.

Method used

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  • Pressure sensor calibration method with temperature compensation function
  • Pressure sensor calibration method with temperature compensation function
  • Pressure sensor calibration method with temperature compensation function

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Embodiment Construction

[0033] The present invention will be further described in detail below in conjunction with test examples and specific embodiments. However, it should not be understood that the scope of the above subject matter of the present invention is limited to the following embodiments, and all technologies realized based on the content of the present invention belong to the scope of the present invention.

[0034] Calibration method for a diffused silicon piezoresistive sensor with an operating temperature range of -30°C to 70°C. The measured normal temperature here is 20°C. In order to better detect the nonlinearity of the sensor, the pressure test value ranges from 70kpa to 800kpa Select 8 pressure values ​​(the more pressure test points, the higher the calibration accuracy), and record the AD indication value of the pressure sensor under the corresponding pressure at room temperature, as shown in Table-3:

[0035] table 3

[0036]

[0037] For the accuracy of measurement above, t...

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Abstract

The invention discloses a pressure sensor calibration method with a temperature compensation function. According to the method, a zero drifting value and a sensitivity drifting value of a pressure sensor are measured at normal temperature and other temperature points, different pressures at the normal temperature and AD values corresponding to the pressures are stored in a pressure parameter table of the pressure sensor, then a zero drifting value and a sensitivity drifting value of the pressure sensor in a full-temperature range are obtained through a curve fitting method when the pressure sensor works, through calculation, the pressure AD values of the sensor at any temperature are converted into AD values at normal temperature, and finally compensated pressure measuring values are obtained according to the parameter table. According to the method, important parameters, namely the zero drifting values and the sensitivity drifting values of the pressure sensor are directly used, and the calibrated pressure sensor is high in precision and is easy to operate.

Description

technical field [0001] The invention relates to a pressure sensor calibration method, in particular to a pressure sensor calibration method with temperature compensation. Background technique [0002] Diffused silicon piezoresistive sensors have been widely used in the field of pressure detection instruments such as pressure gauges and flow meters. The characteristics of the diffused silicon pressure sensor will change with the change of temperature, which will affect the accuracy of the sensor to sense the pressure. Therefore, it is necessary to calibrate the pressure sensor in actual use to improve its accuracy. The key factors affecting the characteristics of diffused silicon piezoresistive sensors are zero drift and sensitivity drift. However, the existing calibration methods for pressure sensors with temperature compensation do not directly use the zero point drift and sensitivity drift to perform temperature compensation on the pressure sensor. It is a new temperatur...

Claims

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Application Information

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IPC IPC(8): G01L27/00
Inventor 刘勋
Owner CHENGDU QIANJIA TECH CO LTD
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