Fabrication method of fiber alignment pedestal array

Abstract

The invention discloses a method for manufacturing an optical fiber alignment substrate array. The method includes the steps of manufacturing a photolithography plate, growing a first silicon oxide film on the back face of a silicon wafer, growing a second silicon oxide film on the front face of the silicon wafer, growing a third silicon nitride film on the back face of the silicon wafer, coating the front face of the silicon wafer with photoresist, carrying out exposure development, etching the second silicon oxide film to form a hard mask layer, carrying out silicon etching to form silicon through holes, etching the positions, at the bottoms of the silicon through holes, of the first silicon oxide film, removing the photoresist and etched reaction polymer, removing the third silicon nitride film on the back face of the silicon wafer, removing the first silicon oxide film and the second silicon oxide film, and forming the optical fiber alignment substrate array. According to the method, the optical fiber alignment substrate array which is high in accuracy and small in size can be formed, the process is stable, the yield is high, faults when the silicon wafer is scanned by an infrared scanner in the production process can be eliminated, the method can be accordingly suitable for large-scale automation production, the use rate of production equipment can be accordingly improved, and the production efficiency can be accordingly improved.

Description

technical field [0001] The invention relates to a manufacturing process method of a semiconductor integrated circuit, in particular to a manufacturing method of an optical fiber alignment base array. Background technique [0002] At present, the application of optical communication devices is becoming more and more extensive, and fiber-to-the-home projects have also begun to be gradually implemented in economically developed areas. Multiple optical fiber channels are required for optical signal processing in an optical system, and long and thin optical fibers need to be fixed on a large number of optical fiber alignment bases (OFAs) to ensure that the quality of the fixed optical fibers meets system requirements. Therefore, high alignment accuracy and stable process are the basic requirements for low optical signal power loss. [0003] At present, the most commonly used method in the industry is to use laser melting glass to make fiber through-hole bases. The laser melting ...

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Problems solved by technology

[0003] At present, the most commonly used method in the industry is to use laser melting glass to make fiber through-hole bases. The laser melting method has the disadvantages of rough manufacturing process, low alignment accuracy, high cost and low efficiency. Poor alignment of optical fibers leads to loss of optical signal power. Serious problem, urgently need a high-precision, low-cost and high-yield manufacturing process to replace it

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