Electrode structure manufacturing method for suppressing reversal domain lateral growth in ferroelectric crystal material polarization process

Abstract

The invention discloses an electrode structure manufacturing method for suppressing reversal domain lateral growth in a ferroelectric crystal material polarization process. The method is used for preparing excellent periodicity domain reversal raster made of ferroelectric crystal materials (comprising LiNbO3, LiNbO3 mixed with MgO, LiTaO3, KTiOPO4 and the like). The method is based on manufacturing and processing of a series of electrode structures and comprises the steps that a comb-type raster electrode is made on a +z face of the ferroelectric crystal materials, a metal electrode is made on a -z face of the ferroelectric crystal materials, a selective proton exchanging layer on the zone expect the electrode on the +z face is made, and an insulation medium layer which is arranged on the exchanging layer in a covering mode is made. According to the method, reversal domain lateral growth in the polarization process can be effectively suppressed, the problem of domain merging during super-short-cycle periodicity polarization crystal materials (PPXX) through an added-pulse voltage method is solved, periodicity polarization on large-thickness (thickness is larger than 1 mm) short-cycle (smaller than 6 microns) ferroelectric crystal materials is achieved, and final results show that the perpendicularity of the periodicity domain reversal raster made through the method is great.

Description

technical field [0001] The invention relates to the technical field of domain inversion grating fabrication in large-thickness short-period ferroelectric crystal materials, and proposes an electrode structure fabrication method capable of suppressing the lateral growth of inversion domain domains during the polarization process of ferroelectric crystal materials . Background technique [0002] Quasi-phase matching (QPM) technology is an important phase matching technology in nonlinear optics. It has many technical advantages. The periodic inversion ferroelectric crystal material produced by it is an important material in the field of optical frequency conversion and optical parameter conversion, especially the quasi-phase-matching frequency-doubling crystal device with ferroelectric domain inversion grating is considered It is an important way to obtain high-intensity blue light. [0003] Because at high temperature, especially when it is close to the Curie temperature, th...

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Problems solved by technology

[0005] In order to solve problems such as domain mergers that are prone to occur in the fabrication of large-thickness and short-period inversion domains, and to achieve the purpose of fabricating domain inversion gratings in ferroelectric crystal materials, this patent provides a method for fabricating polarized electrode structures

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