Manufacturing method of electronic component packaging
An electronic component and manufacturing method technology, which is applied in the field of electronic component packaging manufacturing method, can solve problems such as the thickness of the overall structure, and achieve the effect of thinning the thickness and reducing the production cost.
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no. 1 example
[0071] like Figure 2A to Figure 2M What is shown is a schematic cross-sectional view of the first embodiment of the manufacturing method of the electronic component packaging of the present invention.
[0072] like Figure 2A As shown, a carrier board 20 is provided, which includes a stacked substrate 201 and a substrate dielectric layer 202 , and the opposite surfaces of the substrate 201 may have metal layers (not shown).
[0073] like Figure 2B As shown, a first metal layer 20 a is formed on the base dielectric layer 202 .
[0074] like Figure 2C As shown, a first dielectric layer 21 is formed on the first metal layer 20a, and a second metal layer 21a is also formed on the first dielectric layer 21.
[0075] like Figure 2D As shown, at least one opening 211 is formed in the first dielectric layer 21 through the first dielectric layer 21 and the second metal layer 21a to expose part of the first metal layer 20a, and the opening 211 is formed. For laser ablation.
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no. 2 example
[0086] like Figure 3A to Figure 3O The one shown is a schematic cross-sectional view of the second embodiment of the manufacturing method of the electronic component packaging of the present invention.
[0087] like Figure 3A As shown, a carrier board 30 is provided, which includes a laminated substrate 301 and a substrate dielectric layer 302 , and the opposite surfaces of the substrate 301 may have metal layers (not shown).
[0088] like Figure 3B As shown, a first metal layer 30 a is formed on the substrate dielectric layer 302 .
[0089] like Figure 3C As shown, a plurality of electrical connection pads 30b are formed on the first metal layer 30a.
[0090] like Figure 3D As shown, a first dielectric layer 31 is formed on the first metal layer 30 a and the electrical connection pad 30 b, and a second metal layer 31 a is formed on the first dielectric layer 31 .
[0091] like Figure 3E As shown, at least one opening 311 is formed through the first dielectric lay...
no. 3 example
[0103] like Figure 4A to Figure 4M The one shown is a schematic cross-sectional view of the third embodiment of the manufacturing method of the electronic component packaging of the present invention.
[0104] like Figure 4A As shown, a carrier board 40 is provided, which includes a laminated substrate 401 and a substrate dielectric layer 402 , and the opposite surfaces of the substrate 401 may have metal layers (not shown).
[0105] like Figure 4B As shown, a first metal layer 40 a is formed on the substrate dielectric layer 402 .
[0106] like Figure 4C As shown, a first dielectric layer 41 is formed on the first metal layer 40 a, and a second metal layer 41 a is formed on the first dielectric layer 41 .
[0107] like Figure 4D As shown, the second metal layer 41a is patterned to expose the first dielectric layer 41, and the patterned second metal layer 41a forms the third wiring layer 41b.
[0108] like Figure 4E As shown, at least one opening 411 is formed thr...
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