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Vacuum system compatible coaxial precision linear thruster

A technology of linear propulsion and vacuum system, which is applied to the parts of the instrument, instruments, etc., can solve the problems of discounted use effect and installation convenience, low precision of linear propulsion, uneven force application, etc., to achieve uniform force and high precision. The effect of improving and extending the service life

Active Publication Date: 2016-05-04
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the design of the off-axis drive, the force applied during the linear propulsion process is uneven, the accuracy of the linear propulsion is low, and there are certain requirements for the installation angle, especially in places with limited space. Great discount on effect and ease of installation

Method used

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  • Vacuum system compatible coaxial precision linear thruster
  • Vacuum system compatible coaxial precision linear thruster
  • Vacuum system compatible coaxial precision linear thruster

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Please refer to Figure 1A-Figure 2B , Figure 1A Front view of a coaxial precision linear propulsion device compatible with vacuum systems. Figure 1B is a sectional view taken along the center of the front view of Fig. 1a. The coaxial precision linear propulsion device compatible with the vacuum system includes: a bellows 3 and a coaxial linear drive assembly of the bellows 3. The coaxial linear driving assembly of the bellows includes a left-handed driving part 1 , a connecting part 2 and a right-handed driving part 4 . The bellows 3 can not only realize the linear propulsion function, but also realize the vacuum introduction in its center. Vacuum introduction is a well-known technology in the art, and will not be repeated here. Both ends of the connecting member 2 are respectively connected to the left-handed driving member 1 and the right-handed driving member 4 . The left-handed driving part 1 , the connecting part 2 and the right-handed driving part 4 are all...

Embodiment 2

[0058] image 3 It is a schematic diagram of another embodiment of the present application. In this embodiment, only part is different from Embodiment 1. Only the different parts are described here, and the rest of the same parts will not be repeated.

[0059] Its different parts are: such as image 3 As shown, the outer wall of the left-handed driving member 1 contains a left-handed outer groove 3a. The outer wall of the right-handed driving member 4 contains a right-handed outer groove 3b. One end of the connector 2 has a left-handed inner groove 3d, and the other end has a right-handed inner groove 3e. A passage can just be formed between the left-handed outer groove 3a and the left-handed inner groove 3d, and a plurality of balls 3c are arranged in the passage, so that the left-handed outer groove 3a and the left-handed inner groove 3d can pass through these balls 3c rolls in the channel and rotates relatively, so that the left-handed driving member 1 moves linearly t...

Embodiment 3

[0062] The coaxial precision linear propulsion device compatible with the vacuum system of the present invention can be applied to the electron beam heating evaporation source. like Figure 4 Shown is a simple schematic diagram of a coaxial precision linear propulsion device compatible with a vacuum system applied to an electron beam heating evaporation source, wherein 4a is an SHV high-pressure vacuum inlet port; 4b is a coaxial precision linear propulsion device compatible with a vacuum system of the present invention; 4c is the transfer interface, which mainly provides access for other functions of the electron beam heating evaporation source; 4d is the high-voltage rod, which introduces high voltage to the metal source rod and plays a role in supporting the metal source rod; 4e is the metal source rod to be evaporated ; 4f is a heat shield, generally equipped with a water cooling system to ensure that the evaporation process will not increase the temperature of the surroun...

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Abstract

The invention discloses a vacuum system compatible coaxial precision linearity propulsion apparatus. The apparatus is characterized by comprising a corrugated pipe and a coaxial linearity driving assembly of the corrugated pipe, wherein the coaxial linearity driving assembly of the corrugated pipe comprises a levorotation actuator, a connecting piece and a dextrorotation actuator; the two ends of the connecting piece are respectively connected with the levorotation actuator and the dextrorotation actuator; the levorotation actuator, the connecting piece and the dextrorotation actuator are of hollow structures and form an accommodation space; the corrugated pipe is arranged in the accommodation space; the two ends of the corrugated pipe are respectively fixed on the levorotation actuator and the dextrorotation actuator.

Description

technical field [0001] The invention relates to a coaxial precision linear propulsion device compatible with a vacuum system, especially suitable for electron beam evaporation source (EBE), electronic heating evaporation source, movable sample stage and optical focus adjustment in vacuum, etc. A system that advances operations. Background technique [0002] "Vacuum" refers to the gas state below one atmospheric pressure, the lower the pressure, the higher the vacuum degree. In a vacuum state, the number of gas molecules per unit volume is greatly reduced, the average free path of molecules is increased, and the collisions between gas molecules and between gas molecules and other particles are also reduced. These characteristics are widely used in many departments of scientific research and production. For example: accelerators, electronic devices, large-scale integrated circuits, thermonuclear reactions, space environment simulation, vacuum smelting, food packaging, etc. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
Inventor 武荣庭郇庆闫凌昊高鸿钧
Owner INST OF PHYSICS - CHINESE ACAD OF SCI