A kind of anti-reflection coating based on cage silsesquioxane and its preparation method and application
A technology of silsesquioxane and anti-reflection coatings, which is applied in coatings, instruments, optics, etc., can solve problems such as the influence of coating surface anti-reflection performance, and achieve improved anti-reflection performance, corrosion resistance, and operation convenient effect
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Embodiment 1
[0043] (1) 0.2g of decamethacryloxypropyl cage silsesquioxane (CMSQ-T 10 ) and 0.01g octaaminophenyl cage silsesquioxane (OAPS-T 8 ) mixed to obtain the bottom spin coating, adding 21g of methanol-acetone mixed solvent with a mass ratio of 1:1 and 100ppm cerium ammonium nitrate and mixing uniformly to obtain the bottom spin coating solution; 15 μL of the above bottom spin coating solution was placed in 10% HCl solution After ultrasonic cleaning with acetone for 30 minutes, the center of the quartz glass sheet substrate was spin-coated at 200r / min for 10s and 3000r / min for 10s with a spin coater (WS-400B, Laurell Technologies Corporation) to obtain a uniform transparent primer with a thickness of 80-90nm. layer film; place the quartz glass substrate coated with the bottom coating film in a vacuum drying oven, and pre-cure at 80°C for 15 minutes to obtain the bottom coating;
[0044] (2) Preparation of surface coating film: Add 10g of hexafluorobutyl acrylate monomer (HFBA) and...
Embodiment 2
[0048] (1) 0.2g of decamethacryloxypropyl cage silsesquioxane (CMSQ-T 10 ) and 0.02g octaaminophenyl cage silsesquioxane (OAPS-T 8 ) mixed to obtain the bottom spin coating material, adding 22g of methanol-acetone mixed solvent with a mass ratio of 1:1 and 100ppm cerium ammonium nitrate and mixing uniformly to obtain the bottom spin coating solution; 15 μL of the above bottom spin coating solution was placed in 10% HCl solution respectively After ultrasonic cleaning with acetone for 30 minutes, the center of the quartz glass sheet substrate was spin-coated at 200r / min for 10s and 3000r / min for 10s with a spin coater (WS-400B, Laurell Technologies Corporation) to obtain a uniform transparent primer with a thickness of 80-90nm. layer film; place the quartz glass substrate coated with the bottom coating film in a vacuum drying oven, and pre-cure at 80°C for 30 minutes to obtain the bottom coating;
[0049] (2) Preparation of surface coating film: Add 10g of hexafluorobutyl acryl...
Embodiment 3
[0053] (1) 0.2g of decamethacryloxypropyl cage silsesquioxane (CMSQ-T 10 ) and 0.04g octaaminophenyl cage silsesquioxane (OAPS-T 8 ) mixed to obtain the bottom spin coating material, add 24g of methanol-acetone mixed solvent with a mass ratio of 1:1 and 100ppm cerium ammonium nitrate and mix uniformly to obtain the bottom spin coating liquid; take the above bottom spin coating liquid 15 μ L and put it in 10% HCl solution respectively After ultrasonic cleaning with acetone for 30 minutes, the center of the quartz glass sheet substrate was spin-coated at 200r / min for 10s and 3000r / min for 10s with a spin coater (WS-400B, Laurell Technologies Corporation) to obtain a uniform transparent primer with a thickness of 80-90nm. layer film; place the quartz glass substrate coated with the bottom coating film in a vacuum drying oven, and pre-cure at 80°C for 15 minutes to obtain the bottom coating;
[0054] (2) Preparation of surface coating film: Add 10g of hexafluorobutyl acrylate mon...
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