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Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus

An interference filter, variable technology, used in optics, instruments, optical components, etc., to solve problems such as broken wires

Inactive Publication Date: 2014-08-27
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] However, when a thick connection electrode and a thin reflective film are overlapped and formed, due to external factors such as heat, the metal atoms of the thin reflective film are connected to each other due to changes over time. Problems such as disconnection due to diffusion on the electrode side

Method used

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  • Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus
  • Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus
  • Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus

Examples

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no. 1 approach

[0074] (Structure of spectrometer)

[0075] figure 1 It is a schematic diagram showing the configuration of the spectrometry apparatus according to the first embodiment of the present invention.

[0076] The spectrometer 1 is an electronic device of the present invention, and is a device that measures the spectrum of the measurement target light based on the measurement target light reflected by the measurement target X, for example. In addition, in the present embodiment, although an example of measuring the measurement object light reflected by the measurement object X is shown, when using a luminous body such as a liquid crystal panel as the measurement object X, it is also possible to use the light from the luminous body The emitted light is used as measurement object light.

[0077] Such as figure 1 As shown, the spectrometer 1 includes an optical module 10 and a control unit 20 .

[0078] (Structure of Optical Module)

[0079] The optical module 10 is configured to ...

no. 2 approach

[0219] Next, a second embodiment of the present invention will be described with reference to the drawings.

[0220] In the spectrometry apparatus 1 of the first embodiment described above, the variable wavelength interference filter 5 is provided directly on the optical module 10 . However, the optical module may have a complicated structure, and especially in a downsized optical module, it may be difficult to directly install the variable wavelength interference filter 5 . In this embodiment, an optical filter device capable of easily installing the variable wavelength interference filter 5 in such an optical module will be described.

[0221] Figure 12 It is a cross-sectional view showing a schematic configuration of an optical filter device according to a third embodiment of the present invention.

[0222] Such as Figure 12 As shown, the optical filter device 60 includes a variable wavelength interference filter 5 and a housing 61 for accommodating the variable wavele...

no. 3 approach

[0234] Next, an electronic device using the variable wavelength interference filter described in the above-mentioned first embodiment will be described. In the third embodiment, a colorimetric device for measuring the chromaticity of an object to be measured will be described as an example.

[0235] Figure 13 It is a schematic diagram showing the configuration of the colorimetric device.

[0236] The colorimetric device 80 includes a light source device 82 that emits light toward the inspection object A, a colorimetric sensor 84 (optical module), and a control device 86 that controls the overall operation of the colorimetric device 80 .

[0237] Furthermore, this colorimetric device 80 is a device that reflects the light emitted from the light source device 82 to the inspection object A, receives the reflected inspection object light by the colorimetric sensor 84, and analyzes And measure the chromaticity of the inspection object light, that is, the color of the inspection ...

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Abstract

The thickness of a first drive electrode is greater than the sum of the thickness of a first reflective film and the thickness of a first conductive film, the first drive electrode extends from the surface of a fixed substrate to the surface of the outer edge portion of the first conductive film and is in contact with the first conductive film, the thickness of a second drive electrode is greater than the sum of the thickness of a second reflective film and the thickness of a second conductive film, and the second drive electrode extends from the surface of a movable substrate to the surface of the outer edge portion of the second conductive film and is in contact with the second conductive film.

Description

technical field [0001] The invention relates to a wavelength-variable interference filter, an optical filter device, an optical module and an electronic device. Background technique [0002] There is known a device that measures the spectrum of incident light using a variable wavelength interference filter. [0003] The variable interference device described in Patent Document 1 discloses a configuration in which a reflective film functions as a driving electrode, and a configuration in which the reflective film functions as a capacitance monitor. [0004] 【Prior technical literature】 [0005] 【Patent Literature】 [0006] Patent Document 1: Japanese Patent Application Laid-Open No. 1-94312 [0007] In the structure of the aforementioned Patent Document 1, in order for the reflective film to function as a driving electrode or a capacitance monitor, it is necessary to wire a connection electrode connected to the reflective film. [0008] The reflective film is formed thinn...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/28G02B26/00
CPCG02B26/001G02B5/28G02B5/284G02B5/285G02B27/00
Inventor 新东晋坂下友树
Owner SEIKO EPSON CORP