Thermally driven mems micromirror and 1×n thermally driven mems micromirror array

Abstract

The invention disclose a thermally driven MEMS micro-mirror and a 1*N thermally driven MEMS micro-mirror array. The thermally driven MEMS micro-mirror is composed of a mirror surface, micro-mirror frames and electrical heating driving arms which are connected with the mirror surface and the micro-mirror frames. The micro-mirror frames are arranged at the opposite sides of the mirror surface in pair. The mirror surface is made to rotate by exerting bias voltage on the electrical heating driving arms. The 1*N thermally driven MEMS micro-mirror array comprises N thermally driven micro-mirror units and a substrate provided with a cavity. Each pair of micro-mirror frames are arranged on the two opposite sides on the corresponding mirror surface and are fixed to the cavity of the substrate, and the corresponding mirror surface is made to rotate by exerting bias voltage on the corresponding electrical heating driving arms. The N thermally driven micro-mirror units are arranged at an equal interval and form the 1*N micro-mirror array. According to the thermally driven MEMS micro-mirror and the 1*N thermally driven MEMS micro-mirror array, each micro-mirror is controlled independently through the corresponding electrical heating driving arms which are located on the two sides of the micro-mirror, and the length of each electrical heating driving arm can be adjusted so that design with different angle measuring ranges can be obtained; in addition, according to the design, the 1*N thermally driven MEMS micro-mirror array is driven by low voltage, is high in mirror surface filling rate and wide in measuring range, and therefore heat crosstalk can be effectively reduced.

Description

technical field [0001] The invention relates to a thermally driven MEMS micromirror and a 1×N thermally driven MEMS micromirror array formed therein, belonging to the technical field of microelectromechanical micromirrors. Background technique [0002] For a two-dimensional MEMS array, it is necessary to drive the micromirror in two directions at the same time, so the design of the driver is very important. For the existing array, if the driver is arranged on the four sides of the micromirror, two-dimensional differential drive control can be realized, but the filling rate of the mirror is greatly reduced; if each direction is controlled by a single driver, the filling rate of the mirror can be improved, but not Eliminate test errors introduced by the environment. Therefore, the existing two-dimensional MEMS array cannot realize low-voltage drive with filling rate, high mirror filling rate, and large range at the same time, which has defects. Contents of the invention ...

AI Technical Summary

Problems solved by technology

For the existing array, if the driver is arranged on the four sides of the micromirror, two-dimensional differential drive control can be realized, but the filling rate of the mirror is greatly reduced; if each direction is controlled by a single driver, the filling rate of the mirror can be improved, but not Eliminate test errors introduced by the environment

Therefore, the existing two-dimensional MEMS array cannot simultaneously realize low-voltage drive with filling rate, high mirror filling rate, and large range, and there are defects

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