Integrated differential quartz beam accelerometer with temperature measurement function based on t-shaped structure

Abstract

The invention discloses an integrated differential quartz beam accelerometer with temperature measuring function based on a T-shaped structure. The accelerometer includes a resonator, a mass block, a positive electrode, a negative electrode, an installation frame, an isolation frame, a fixed Frame and connecting arm; the positive and negative electrodes are covered with copper on the resonator, fixed frame, connecting arm and mounting frame, and the resonator is between the mass block and the fixed frame. The quartz vibrating beam accelerometer designed in the present invention adopts the structural form of vertical beams, cross beams and T-beams, so that the resonator has the function of measuring temperature information, and the equivalent stiffness of the three-beam structure in the direction of the sensitive axis is very low, which can realize High sensitivity acceleration measurement. The equivalent stiffness in the direction of the non-sensitive axis is very large, which can effectively suppress the interference of the force in the direction of the non-sensitive axis. From the structural design, the mechanical coupling between the two differential structure resonators can be eliminated, the detection blind area of ​​the accelerometer can be eliminated, and the detection accuracy of the quartz vibrating beam accelerometer can be improved.

Description

technical field [0001] The present invention relates to an accelerometer, more particularly, refers to an integrated differential quartz vibrating beam accelerometer based on a T-shaped structure with a temperature measurement function, belonging to a micro-electromechanical system (abbreviated as MEMS, Micro-Electro-MechanicalSystem ) in the field of micro-inertial sensing technology. Background technique [0002] Quartz vibrating beam accelerometer is a MEMS inertial sensor based on quartz force-frequency characteristics. It has the advantages of low cost, small size, large range, high sensitivity, good scale factor stability, and direct digital output. It can be widely used in tactical missiles Attitude control, inertial navigation, geodetic gravity measurement, earth resource exploration and micro-robots have important military and civilian values. [0003] The quartz vibrating beam accelerometer is reassembled to form a differential structure, so there is a large mecha...

AI Technical Summary

Problems solved by technology

[0003] The quartz vibrating beam accelerometer is reassembled to form a differential structure, so there is a large mechanical coupling between the two resonators, which will lead to a large measurement blind area

In addition, the elastic stiffness of the flexible hinge is very large, which limits the movement range and response sensitivity of the mass block when sensing the change of the accelerometer, reduces the sensitivity of the quartz beam accelerometer, and makes it difficult to achieve high-precision acceleration measurement

Images