Sintering apparatus

A technology of sintering device and furnace core tube, which is applied in glass forming, lighting and heating equipment, furnace components, etc., and can solve problems such as leakage
CN104098255AInactive Publication Date: 2014-10-15SHIN ETSU CHEM CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHIN ETSU CHEM CO LTD
Publication Date
2014-10-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a sintering apparatus for manufacturing quartz glass by heating and sintering a soot deposition body formed of a powder containing silicon dioxide. The sintering apparatus comprises a furnace core tube having an opening in a top end through which the soot deposition body is inserted, and has atmospheric gas introduced therein from below and expelled upward; a shaft from which the soot deposition body hangs; a lid that has the shaft inserted therethrough and can cover the opening; a heating furnace that heats the soot deposition body; an internal lid in a top portion of the furnace core tube that divides the top portion of the furnace core tube into an upper region and a lower region; and a gas flow path that connects the two regions to each other and has the atmospheric gas flow therethrough. Total cross-sectional area, relative to movement direction of the atmospheric gas, of the gas flow path is less than cross-sectional area, relative to movement direction of the atmospheric gas, of the furnace core tube.
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Description

technical field

[0001] This invention relates to the manufacture of high purity synthetic silica glass for use in optical fibers and the like. Background technique

[0002] As a method for producing synthetic quartz glass, Japanese Patent Application Laid-Open No. 2012-250887 describes the method of heating and sintering a soot deposited body produced by depositing fine silica powder produced by reacting a silicon compound in a sintering furnace. method. A VAD method, an OVD method, etc. are known as the manufacturing method of a soot deposit. The structure of the sintering furnace includes, for example, a heating furnace and a core tube, and a gas suitable for the sintering atmosphere is introduced or discharged into the core tube. The above-mentioned soot-deposited body is introduced into the furnace tube and heated in an appropriate atmosphere to become a transparent glass body. In order to maintain the atmosphere during sintering in an appropriate state, the furnace c...

Claims

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