Water-cooled rod and crystal growth furnace using the water-cooled rod

Abstract

The invention relates to the field of crystal growth equipment, and specifically relates to a water-cooled rod, which utilizes a crucible descending method to grow large-size crystals, and a crystal growth furnace using the water-cooled rod. The provided water-cooled rod comprises an upper water-cooled section and a lower water-cooled section; and the upper water-cooled section and lower water-cooled section are both provided with a water inlet and a water outlet. The invention further provides a crystal growth furnace comprising the water-cooled rod. The thermal field is adjusted through a sectional water-cooled rod, thus the crystallization latent heat can be effectively conducted, and the balance of thermal filed is guaranteed. Beside the invention also provides an enclosed crystal growth furnace comprising the water-cooled rod. The enclosed crystal growth finance completely eliminates the environmental pollution of volatile matters, besides the crucible does not need to be sealed and thus can be used repeatedly, and the heating furnace filament can be prevented from oxidation in a vacuum or aerated state.

Description

technical field [0001] The invention relates to the field of crystal growth equipment, in particular to a water-cooled rod for growing large-sized crystals using a crucible drop method and a crystal growth furnace using the water-cooled rod. Background technique [0002] The crucible descending method, also known as the Bridgman crystal growth method, is to gradually lower a vertically placed crucible so that it passes through a temperature gradient zone with a high temperature and a low temperature, and the melt solidifies from the bottom up to grow the crystal. [0003] Crystal growth furnace is one of the key equipment for growing crystals. The furnace body of the crystal growth furnace using the crucible drop method generally includes an upper furnace and a lower furnace. The upper furnace is a high-temperature zone, which is generally heated by resistance wires and silicon-molybdenum rods, which can keep the materials in the crucible in a molten state, and the lower fur...

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Problems solved by technology

[0006] In view of this, the present invention provides a water-cooled rod and a growth furnace using the water-cooled rod to solve the problem that the water-cooled rod in the prior art cannot effectively adjust the temperature field, and at the same time provides a closed-type furnace using the water-cooled rod Crystal growth furnace, the closed crystal growth furnace not only solves the problem of volatilization of raw materials to the external environment after melting when growing crystals, but also solves the problem that the sealed crucible cannot be used multiple times

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