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Linear motor system and control method thereof as well as photoetching machine applying linear motor system

A technology of linear motor and controller, applied in the direction of AC motor control, control system, propulsion system, etc., to achieve the effect of wide control frequency, fast response speed and good control randomness

Inactive Publication Date: 2014-10-29
SHANGHAI FUXUN PHOTOELECTRIC CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, the existing linear motor control method cannot make it perform optimally.

Method used

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  • Linear motor system and control method thereof as well as photoetching machine applying linear motor system
  • Linear motor system and control method thereof as well as photoetching machine applying linear motor system
  • Linear motor system and control method thereof as well as photoetching machine applying linear motor system

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Embodiment Construction

[0028] The specific implementation of the linear motor system and its control method, and the photolithography machine using the linear motor system of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] See attached figure 1 , the linear motor system includes a linear motor and a servo controller that controls the linear motor. The servo controller includes a control input, a master controller, a slave controller and two servos. The control input sends synchronous data to the master controller, and the master controller Process the synchronous data and obtain the X-axis and Y-axis coordinates of the linear motor, the master controller transmits the X-axis and Y-axis coordinates of the linear motor to the slave controller, and the slave controller controls two servos to make the X-axis of the linear motor It moves synchronously with the Y axis.

[0030] The linear motor adopts the linear motor produced by DANAHER com...

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Abstract

The invention relates to the field of a newly-developing machining technology, and discloses a linear motor system. The liner motor system comprises a linear motor and a servo controller, wherein the servo controller comprises a control input, a main controller, a slave controller and two servers. The invention discloses a photoetching machine applying the linear motor system and a control method of the linear motor system. The servo controller provided by the invention can monitor the operation of the linear motor in real time, and the servo controller is fast in response speed, wide in control frequency and good in control randomness.

Description

technical field [0001] The invention relates to the field of emerging machining technologies, in particular to a linear motor system and a control method thereof, and a photolithography machine using the linear motor system. Background technique [0002] In traditional machine tools, servo motors are widely used in conjunction with ball screw drive systems, which is why the precision of transmission machine tools cannot be improved. With the widespread use of CNC machine tools, the requirement of high-speed response and precision has been paid more and more attention. [0003] Linear motors are applied to CNC machine tools due to their high dynamic response performance and exceptionally sensitive and fast response. Linear motor is a kind of transmission device that converts electrical energy directly into mechanical energy of linear motion by expanding a closed magnetic field into an open magnetic field without any intermediate conversion mechanism. The structure of the li...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K41/02H02K11/00H02P25/06H02K11/20
Inventor 郑春滨
Owner SHANGHAI FUXUN PHOTOELECTRIC CO LTD
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