Active ultra-precise displacement positioning detection method based on virtual grating ruler

A technology of grating scale and displacement, which is applied in the direction of measuring devices, optical devices, and feedback control, etc., can solve problems such as motion interference and motion errors that are difficult to avoid, and improve the accuracy of displacement detection and control, ensure detection and control accuracy, Detecting the effect of control simplicity

Active Publication Date: 2016-08-31
常州飞石机器人系统有限公司
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Problems solved by technology

However, due to the use of a double-layer platform in this prior art, it is difficult to avoid motion interference and motion errors during the movement of the double-layer platform during the handover stage. This error will be more obvious in ultra-precise positioning.

Method used

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  • Active ultra-precise displacement positioning detection method based on virtual grating ruler
  • Active ultra-precise displacement positioning detection method based on virtual grating ruler
  • Active ultra-precise displacement positioning detection method based on virtual grating ruler

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Embodiment

[0025] Such as figure 1 As shown, in this embodiment, macro positioning is performed first, and when the positioning displacement is less than the fringe equivalent of the interferometer, the phase of the grating is moved up and down to form two virtual grating signals. The two virtual grating signals correspond to the two moving directions up and down respectively. The virtual grating ruler signal is used for pulse counting feedback control to realize micro-positioning.

[0026] The macro positioning refers to directly shaping the signal output by the grating interferometer 1 as a feedback detection signal to perform detection and positioning control on the linear displacement platform 2 .

[0027] In this embodiment, it is assumed that the positioning distance of the linear displacement platform from the origin is 8.35685 mm, the signal resolution of the grating interferometer 1 in this embodiment is 1.6 μm, and the wavelength of the laser light source of the grating interfe...

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Abstract

An active ultra-precise displacement positioning detection method based on a virtual grating ruler in the field of position or direction control. The method first performs macro positioning, and when the positioning displacement is less than the fringe equivalent, moves the grating phase up and down to form two virtual grating ruler signals. The two virtual grating ruler signals respectively correspond to the up and down two moving directions, and pulse counting feedback control is performed on the two virtual grating ruler signals to realize micro-positioning. The invention forms a virtual grating ruler output pulse with dual output signals, realizes closed-loop pulse feedback control using the virtual grating ruler signal as a feedback pulse, and improves detection and control accuracy of a positioning system.

Description

technical field [0001] The invention relates to a method in the field of position or direction control, in particular to an active ultra-precise displacement positioning detection method based on a virtual grating ruler. Background technique [0002] It is a very complicated process to perform high-precision detection and control of the mechanical displacement of moving parts, especially with the continuous expansion of high-tech fields, the feature size in the field of micro-machining and biological manipulation is becoming more and more fine, and the ultra-precision The requirements for detection and positioning control are getting higher and higher. With the continuous introduction of various advanced measurement and control methods, the ultra-precise positioning accuracy is rapidly developing to the nanometer and sub-nanometer scales; more attention. [0003] The positioning accuracy of the ultra-precision positioning system is greatly limited by the measurement resolut...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05D3/12G01B11/02
Inventor 时轮
Owner 常州飞石机器人系统有限公司
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