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Problems solved by technology
[0004] The purpose of the present invention is to solve the problems that the humidity sensor of the radiosonde is easy to condense in the high-altitude low-temperature, high-humidity harsh environment, the humidity fluctuates greatly in the high-altitude environment, and the distributed capacitance of the circuit board has an impact on the measurement results. The present invention provides a radiosonde Heated humidity sensor for instrument, preparation method thereof, and a humidity detection circuit
Method used
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specific Embodiment approach 1
[0039] Specific implementation mode one: combine figure 1 Describe this embodiment mode, the heating type humidity sensor for sonde described in this embodiment mode, it comprises base 1, first insulating layer 2, serpentine heater electrode 8, second insulating layer 9, lower electrode 10, sensor A wet layer 11 and a porous upper electrode 12; wherein, the upper surface of the substrate 1 is laid with a first insulating layer 2; the upper surface of the first insulating layer 2 is provided with a serpentine heater electrode 8;
[0040] The serpentine heater electrode 8 includes a first heater pad 5, a second heater pad 6, a first extraction electrode, a first part of the serpentine electrode, a second part of the serpentine electrode, a third part of the serpentine electrode and the second lead-out electrode;
[0041] One end of the first lead-out electrode is connected to the head end of the first part of the serpentine electrode, the end of the first part of the serpentine...
specific Embodiment approach 2
[0077] Specific embodiment two: this embodiment is the preparation method of the heating type humidity sensor described in specific embodiment one for sonde, and described method comprises the following steps:
[0078] Step 1: preparing the substrate 1 of the sensor, and cleaning the prepared substrate 1 with deionized water;
[0079] Step 2: Oxidize the surface of the substrate 1 prepared in step 1 to form a dense layer of SiO 2 , as the first insulating layer 2;
[0080] Step 3: Obtain the upper surface of the insulating layer in step 2, and prepare the serpentine heater electrode 8 by photolithography and magnetron sputtering;
[0081] Step 4: Prepare Al on the upper surface of the serpentine heater electrode 8 prepared in Step 3 by radio frequencysputtering 2 o 3 protective layer, as the second insulating layer 9;
[0082] Step 5: Prepare the lower electrode 10 on the upper surface of the second insulating layer 9 by photolithography and magnetron sputtering;
[0083...
specific Embodiment approach 3
[0086] Specific embodiment three: this embodiment is a further limitation on the preparation method of the heating humidity sensor for radiosondes described in specific embodiment two. In step one, the substrate 1 is a single crystal with a thickness of 400 μm and a crystal orientation of 100 silicon;
[0087] In step 2, the thickness of the insulating layer is 500nm-1000nm.
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Abstract
The invention relates to a heating type humidity sensor for a sonde and a preparation method of the heating type humidity sensor as well as a humidity detection circuit, belonging to the technical field of a humidity sensor, and aiming at solving the problems that a humidity sensor for a sonde is easily dewed in a high-altitude severe environment with low temperature and high humidity and has large humidity fluctuation in the high altitude environment, and measurement results are influenced by the distributed capacitance of a circuit board. The humidity sensor is a flat plate sandwiched capacitive humidity sensor with a snake-like heater. The invention also provides the preparation method of the sensor and the humidity detection circuit based on capacitance charge-discharge and a comparison method. According to the invention, temperature drift and zero drift are effectively inhibited, and the influence of parasitic capacitance to measurement results can be reduced. The heating type humidity sensor is used for the sonde.
Description
technical field [0001] The invention belongs to the technical field of humidity sensors. Background technique [0002] The operational level of upper-air meteorological detection is one of the main references to measure the scientific level of a country's atmospheric detection, and humidity detection is an important part of upper-air meteorological detection. Due to the harsh high-altitude environment, drastic changes in humidity, and the lowest ambient temperature reaches -90°C, this requires the humidity sensor to have the advantages of low temperature resistance, fast response, and strong anti-interference ability, and the capacitive humidity sensor has the above characteristics, and the manufacturing cost is relatively low. , has become one of the important research directions of humidity sensors used in radiosondes. However, due to the structural characteristics of the capacitive humidity sensor, when it is in a high-humidity environment, the surface of the humidity se...
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