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A Compensation Controller for Restraining the Positioning Force of Linear Motor

A compensation controller and linear motor technology, applied in the direction of motor generator control, electronic commutation motor control, generator control, etc., can solve the problems of long control cycle, slow response speed, complex structure of compensation controller, etc., and achieve compensation Controlling the effect of simplification

Active Publication Date: 2017-01-18
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the current compensation controller has a complex structure and a long control cycle and a slow response speed. The present invention provides a compensation controller for suppressing the positioning force of a linear motor

Method used

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  • A Compensation Controller for Restraining the Positioning Force of Linear Motor
  • A Compensation Controller for Restraining the Positioning Force of Linear Motor
  • A Compensation Controller for Restraining the Positioning Force of Linear Motor

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specific Embodiment approach 1

[0012] Specific implementation mode one: combine figure 1 Describe this embodiment, a linear motor positioning force compensation controller described in this embodiment, which includes a position given module, a positioning force disturbance module, a delay module, an ILC controller, 8 arithmetic units, a first PID controller, second PID controller, third PID controller, ramp response module, first transfer function module, second transfer function module, third transfer function module, fourth transfer function module, band-limited white noise module, A first differential module, a second differential module, a differential transformation module, a gain amplifier, a feedback coefficient amplifier and a proportional coefficient amplifier;

[0013] The position given signal output by the position given module is sent to the ILC controller, the disturbance signal output by the positioning force disturbance module is sent to the delay module and the ILC controller at the same ti...

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Abstract

The invention relates to a compensating controller for suppressing positioning disturbance of a linear motor, belongs to the field of motor compensation control and aims to solve the problem that an existing compensating controller is complicated in structure, long in control period and slow in reaction. The compensating controller presented adopts a method of an iteration controller and compensates thrust fluctuation of a permanent-magnet synchronous linear motor, and the compensating controller is designed by combining PI (proportion integration) and repeated control. By the compensating controller, system expense generated by a complicated mathematic model or redundant modeling data during compensating control by the aid of disturbance model is avoided, compensating control of nonlinear thrust fluctuation of the linear motor is greatly simplified, control period can be effectively shortened, and reaction speed of the system is increased. Besides, the compensating controller is used for positioning compensation of the linear motor.

Description

technical field [0001] The invention belongs to the field of motor compensation control. Background technique [0002] In order to ensure the quality and production efficiency of integrated circuit chips, lithography equipment requires synchronous movement of each subsystem to achieve large-stroke, high-speed, and high-precision movement. At present, long-stroke linear motors are widely used as the main drive components in the ultra-precision motion platforms of lithography equipment. Although linear motors have good dynamic performance and can excellently meet the requirements of general servo equipment for control accuracy and response speed, for ultra-precision motion platforms, the inherent positioning force disturbance of linear motors will still have a great impact on the actual performance of the system. big negative impact. In this project, according to the comprehensive index, the equipment adopts a high-power single-sided flat iron core permanent magnet synchrono...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02P21/00H02P21/14
Inventor 刘杨宋法质刘法志谭久彬杨旭东
Owner HARBIN INST OF TECH