Checking device, checking device correcting method and checking method thereof

Abstract

The invention provides a checking device, a checking device correcting method and a checking method thereof. In the checking device for checking objects of sensor panel, etc, correction for an error caused by factors of parasitic capacitance of a cable, etc. can be realized, and furthermore small static capacitance of the sensor panel can be measured in a fine precision. On condition that the sensor panel is detached, the correcting part (46) of a sensor panel checking device (1) supplies an AC signal of a signal part (11) to at least one in a plurality of second cables (37), and furthermore voltage and phase of an AC power supply which corresponds with a galvanometer are adjusted in a correcting signal part (42), so that output of the galvanometer of a current detecting part (41) which is electrically connected with a first cable (36) is kept to zero. If the output of the galvanometer is zero, the voltage and the phase of the AC power supply are stored. In checking the sensor panel, based on the stored voltage and phase, the AC power supply of the correcting signal part (42) is made to generate the AC signal.

Description

technical field [0001] The present invention mainly relates to an inspection device for inspecting a capacitive sensor panel or the like. Background technique [0002] Conventionally, a so-called capacitive touch panel device has been known as one type of touch panel device that detects a touched position. The sensor panel of the capacitive touch panel device has a structure in which a first patterned transparent conductive layer and a second patterned transparent conductive layer are provided on a transparent substrate formed of, for example, glass. The above-mentioned patterned transparent conductive layer is formed, for example, by using indium tin oxide (Indium Tin Oxide, ITO) to form a film. [0003] The two patterned transparent conductive layers are arranged vertically and intersecting each other, and are respectively used as electrodes. In addition, hereinafter, the first patterned transparent conductive layer and the second patterned transparent conductive layer m...

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Problems solved by technology

[0007] However, in such a method of inspecting by directly contacting the contact head, there is no stability between the above-mentioned electrodes made of ITO film and the contact head, and the electrical characteristics cannot be accurately measured due to the instability of the contact resistance of the oxide film.

In addition, since the contact head is in direct contact with the electrode of the inspection object, there is a problem that scratches are formed and the quality deteriorates.

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