Sacrificial layer of micromechanical structure and manufacture method of micromechanical structure

A technology of micro-mechanical structure and manufacturing method, which is applied in the direction of micro-structure technology, micro-structure devices, manufacturing micro-structure devices, etc., can solve the problems of high cost, difficulty in forming sacrificial layer materials, long process cycle, etc., and achieve low cost and production Short process cycle, fast and effective removal effect

Active Publication Date: 2015-01-07
SOUTHWEST CHINA RES INST OF ELECTRONICS EQUIP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These methods all use physical deposition or chemical deposition. It is also difficult to form a sacrificial layer material of hundreds of microns, and the process cycle is long and the cost is high.

Method used

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  • Sacrificial layer of micromechanical structure and manufacture method of micromechanical structure
  • Sacrificial layer of micromechanical structure and manufacture method of micromechanical structure
  • Sacrificial layer of micromechanical structure and manufacture method of micromechanical structure

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specific Embodiment 1

[0037] A method for fabricating a sacrificial layer of a micromechanical structure, which uses a low-melting-point alloy as a material to make the sacrificial layer; the low-melting-point alloy refers to an alloy material with an alloy melting point below 300 degrees Celsius. This method not only solves the problem of filling and removing the sacrificial layer with a thickness exceeding 500 microns. Due to the low melting point alloy, the thermal stress in the process is small, the realization process is simple, and the cost is low. At the same time, it is compatible with organic materials in the structure.

[0038] Such as image 3 with Figure 4 As shown, in this specific embodiment, the manufacturing method steps of the low melting point alloy sacrificial layer are:

[0039] 1. Coat the metal mixture material that forms a low melting point alloy on the base structure; uniformly coat the low melting point metal mixture on the base structure by printing or manual methods; ...

specific Embodiment 2

[0047] A method for manufacturing a micromechanical structure, the specific method steps are:

[0048] 1. If figure 1 As shown, the base structure of the micro-mechanical structure is made, including the substrate and the effective structure; before the micro-mechanical structure is made of a suspension or the final closed structure layer, the auxiliary materials used in the micro-structure processing are removed to expose the base structure that needs to be filled with a low-melting point alloy, including Effective structure and auxiliary structure.

[0049] 2. If image 3 As shown, a metal mixture material forming a low-melting point alloy is coated on the base structure;

[0050] 3. If Figure 4 As shown, the metal mixture material is heated and alloyed to form a low melting point alloy filling; the low melting point metal mixture is evenly coated in the structure, and then heated and alloyed to form a relatively smooth low melting point alloy filling. After cooling, cl...

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Abstract

The invention provides a sacrificial layer of a micromechanical structure and a manufacture method of the micromechanical structure. Low-melting-point alloy is used for manufacturing the sacrificial layer of the micromechanical structure and refers to an alloy material with melting point of the alloy of below 300 DEG C; the sacrificial layer of the micromechanical structure can reach hundreds of micrometers, can be rapidly and effectively removed and can be compatible with organic matters; and the manufacture method of the micromechanical structure based on the sacrificial layer process can be operated simply, and the process period is 1 / 4 of that of the conventional thin film deposition method.

Description

technical field [0001] The invention relates to a sacrificial layer of a micro-mechanical structure and a manufacturing method of the micro-mechanical structure. Background technique [0002] The sacrificial layer process is one of the key technologies in the fabrication of micromechanical structures. The sacrificial material is retained or filled during the fabrication of the micromechanical structure to ensure the feasibility of subsequent process steps. After all the structures are fabricated, the suspension structure or the cavity structure can be released by selectively removing the material of the sacrificial layer. The process was first developed by the University of California, Berkeley. The structural material is polysilicon, and the sacrificial material is silicon dioxide. With the development of micromechanical technology, higher requirements are put forward for the material of the sacrificial layer, including greater thickness, lower cost, and easier realizatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
Inventor 彭挺林玉敏刘志辉
Owner SOUTHWEST CHINA RES INST OF ELECTRONICS EQUIP
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