Suction structure, robot hand and robot

An adsorption structure and suction cup technology, which is applied in the direction of manipulators, conveyor objects, semiconductor/solid-state device manufacturing, etc., can solve the problems of increased size, reduced substrate thickness, and inability to absorb substrates, and achieve the effect of reliable adsorption.

Inactive Publication Date: 2015-01-14
YASKAWA DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There is a problem that the substrate cannot be vacuumed and fixed
[0008] This problem is a common problem that may occur due to the decrease in thickness or increase in size of the substrate, the material of the substrate, or the state change of the substrate during the processing process, such as the above-mentioned influence of heat or film formation.

Method used

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  • Suction structure, robot hand and robot
  • Suction structure, robot hand and robot
  • Suction structure, robot hand and robot

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0037] First, refer to figure 1 The structure of the robot 1 according to the first embodiment will be described. figure 1 It is a schematic perspective view of the robot 1 according to the first embodiment.

[0038] For easy understanding, in figure 1 A three-dimensional orthogonal coordinate system including a Z-axis with the vertical upward as the positive direction and the vertical downward as the negative direction is illustrated in . Therefore, the direction extending along the XY plane represents the "horizontal direction". This orthogonal coordinate system may also be shown in other drawings used in the following description.

[0039] In the following description, for convenience of description, it is assumed that the swing position and direction of the robot 1 are in figure 1 In the state shown, the positional relationship between the parts of the robot 1 will be described.

[0040] In the following description, there are cases where, among many components, refer...

no. 2 approach

[0097] Figure 5A It is a schematic plan view of the suction cup 13A according to the second embodiment. Figure 5B is along Figure 5A A schematic cross-sectional view of the line VB-VB'. In the second embodiment, components different from those of the first embodiment will be mainly described.

[0098] like Figure 5A As shown, unlike the suction cup 13 of the first embodiment, the suction cup 13A of the second embodiment further includes a flange (rim) portion 13d extending and protruding from the outer peripheral edge of the contact portion 13a in a rim-like shape.

[0099] like Figure 5B As shown, the flange portion 13d is provided at the same height as the main surface portion 13b so as to extend continuously from the main surface portion 13b. The support body 15 is fixedly attached to the lower surface (back surface) of the flange portion 13d so as to elastically support the suction cup 13A only in a portion surrounding the outer peripheral edge of the flange port...

no. 3 approach

[0122] Figure 8A It is a schematic plan view of the suction cup 13B according to the third embodiment. Figure 8B and Figure 8C is along Figure 8A A schematic cross-sectional view taken along the line VIIIB-VIIIB'.

[0123] In the third embodiment, components different from those of the first and second embodiments will be mainly described. The shape of the suction cup 13B is substantially the same as that of the suction cup 13A of the second embodiment.

[0124] like Figure 8A As shown, the suction cup 13B according to the third embodiment includes a support body 15A that elastically supports its outer peripheral surface at the side.

[0125] Specifically, as Figure 8B As shown, on the inner circumferential surface of the annular wall portion 12b of the plate 12, the support body 15A elastically supports the outer circumferential surface of the suction pad 13B at the side thereof. The support body 15A, which is a substantially annular elastic body, is fixed to the...

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PUM

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Abstract

A suction structure includes a fixing base, a pad, and a support body. The pad includes a contact portion which makes contact with a target object to be sucked. The support body is installed to the fixing base and the support body is configured to elastically support the pad. Further, the pad and the support body define an inner space, and the fixing base includes a suction hole which brings the inner space into communication with a vacuum source.

Description

technical field [0001] Embodiments disclosed herein relate to an adsorption structure, a robotic hand, and a robot. Background technique [0002] In the related art, a substrate transfer robot that transfers a thin substrate such as a wafer or a glass substrate is known (for example, refer to Japanese Patent Application Laid-Open No. 2008-28134). [0003] The robot includes, for example, an arm and a robot hand (hereinafter, referred to as a "hand") attached to the front end of the arm. The robot transports the substrates by holding the substrates with the hands while operating the arms in the horizontal direction and other directions. [0004] In the process of conveying the substrate, it is necessary to reliably hold the substrate and prevent the position of the substrate from shifting. Therefore, there is proposed a robot including a hand having a suction structure using a vacuum chuck or the like, which holds the substrate during conveyance of the substrate by causing ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25J15/06B65G49/07
CPCB25J15/0683H01L21/67742H01L21/67766H01L21/6838
Inventor 古市昌稔日野一纪安藤隆治
Owner YASKAWA DENKI KK
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