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Apparatus and method for producing solar cells with a heater apparatus

A technology of solar cells and heating devices, applied in the field of solar photovoltaics, which can solve problems such as difficulties in stoichiometric compounds and poor film adhesion

Active Publication Date: 2015-01-21
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The different melting points of the four elements make the controlled formation of stoichiometric compounds on large substrates very difficult
Additionally, film adhesion is very poor when co-evaporation is used

Method used

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  • Apparatus and method for producing solar cells with a heater apparatus
  • Apparatus and method for producing solar cells with a heater apparatus
  • Apparatus and method for producing solar cells with a heater apparatus

Examples

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Embodiment Construction

[0045] Referring to the drawings, in which like symbols are used to designate like elements for ease of understanding, various embodiments of solar cells or multi-gate semiconductor devices and methods of forming the same are described. The figures are not drawn to scale.

[0046] The following description serves as a teaching for representative examples. Various modifications can be made to the embodiments described herein and still be beneficial. Some of the desirable benefits described below can be achieved by selecting some of the components or steps described herein without using other components or steps. Accordingly, various modifications and amendments, and subsets of the components and steps described herein are possible and may even be desirable under certain circumstances. Accordingly, the following description serves the purpose of illustration, but not limitation of the invention.

[0047] The description of the exemplary embodiments is intended to be read in c...

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Abstract

A method and apparatus for forming a solar cell can include a heater apparatus having one or more heater elements in a deposition processing system, a front cover covering the one or more heater elements from a front side, and a back metal reflector mating with the front cover on a back side and enclosing the one or more heater elements. The method can include disposing a plurality of substrates about a plurality of surfaces of a substrate apparatus that is operatively coupled to sequentially feed a substrate within a vacuum chamber, forming an absorber layer over a surface of each one of the plurality of substrates and heating the surface of each one of the plurality of substrates with the heater apparatus as described above.

Description

technical field [0001] The present invention relates generally to the field of solar photovoltaics, and more particularly to apparatus and methods for manufacturing solar cells using heating apparatus. Background technique [0002] Copper indium gallium diselenide (CIGS) is a commonly used absorber layer in thin film solar cells. In a laboratory environment, CIGS thin film solar cells have achieved very good conversion efficiencies (>20%). Most commonly used CIGS depositions can be achieved by co-evaporation or selenization. Co-evaporation involves simultaneously evaporating copper, indium, gallium, and selenium. The different melting points of the four elements make the controlled formation of stoichiometric compounds on large substrates very difficult. In addition, film adhesion is very poor when co-evaporation is used. Selenization involves a two-step process. In the first step, copper, gallium and indium precursors are sputtered onto the substrate. In the second...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCH01L31/1876C23C14/0623C23C14/505C23C14/541C23C14/568H01L21/67115H01L31/0322H01L31/0326Y02E10/541Y02P70/50
Inventor 吕维伦黄俊颖李文钦
Owner TAIWAN SEMICON MFG CO LTD