A kind of mems methane sensor and its application and preparation method

Abstract

An MEMS methane sensor, and application and manufacturing method thereof, being suitable to be used in a coal mine detection; the sensor comprises a P-type silicon substrate (01), an N-type silicon (02) provided on the P-type silicon substrate (01), and a silicon heating assembly (101) machined and prepared by the N-type silicon (02) on the P-type silicon substrate (01); and the silicon heating assembly (101) comprises two fixed ends (102), a silicon heater (1011) and two silicon cantilevers (1012). The sensor utilizes a common monocrystal silicon as a material of the heating assembly serving as a sensitive assembly, and does not need a catalyst carrier or a catalyst material. The machining process is compatible with a CMOS process, and the releasing of the heating assembly employs a wet silicon etching process capable of simultaneously etching in two directions. The sensor has a low cost, a high sensitivity and a low power consumption, and the measurement is free of the effect of oxygen concentration, carbon deposition and poisoning.

Description

technical field [0001] The invention relates to a methane sensor and its application and preparation method, which is suitable for a MEMS methane sensor used in coal mine safety detection and its application and preparation method. Background technique [0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost. At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines. It consumes a lot of power. The use of catalysts leads to unstable methane detection performance and short calibration time. Poisoning, activation and other disadvantages caused by the use of catalysts; while the infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; these two me...

AI Technical Summary

Problems solved by technology

[0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost

At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines. It consumes a lot of power. The use of catalysts leads to unstable methane detection performance and short calibration time. Poisoning, activation and other disadvantages caused by the use of catalysts; while the infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; these two methane sensors cannot well meet the requirements of the Internet of Things for low power consumption. Application Requirements for Methane Sensors

Other methane sensors cannot adapt to the complex environment of high humidity in coal mines

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