Mems methane sensor based on silicon heater and its preparation method and application

Abstract

A silicon heater-based microelectromechanical systems (MEMS) methane sensor and a manufacturing method therefor, related to methane sensors and manufacturing methods therefor, and specifically related to a methane sensor employing a MEMS processing technique, a manufacturing method for the sensor, and a methane detection method therefor. The methane sensor employs a common monocrystalline silicon wafer to process a silicon heater (1011). The silicon heater (1011) also serves as a methane-sensitive component and obviates the need for a catalyst carrier and a catalyst material. A processing process for the methane sensor is compatible with a CMOS process, provides the advantage of being inexpensive if produced by mass, and allows batch calibration. The methane sensor has the characteristics of having a low power consumption, high sensitivity, and fast response rate, preventing methane detection from being affected when oxygen is deficient, and being free from effects brought forth by a catalyst, such as carbon deposition and poisoning.

Description

Technical field [0001] The invention relates to a sensor and a preparation method and application thereof, in particular to a silicon heater-based MEMS methane sensor used in the prevention and control of gas in industrial and mining enterprises, and a preparation method and application thereof. Background technique [0002] With the development of the Internet of Things, current methane sensors cannot meet the needs of a large number of personal mobile monitoring equipment for low-power, long-life, and low-cost high-performance methane sensors that detect low-concentration methane. At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still widely used in coal mines. Its principle is based on the heat release effect of the catalytic combustion reaction of methane gas, which consumes a lot of power and has many insurmountable shortcomings due to the use of catalysts. Such as the short adjustment cycle, carbon deposits, poisoning, activa...

AI Technical Summary

Problems solved by technology

The existing catalytic combustion methane sensor uses a coil wound with precious metals such as platinum wire as the heating element, which is difficult to mass produce, has poor consistency, and consumes a lot of power

Therefore, the application requirements of the Internet of Things for methane sensors cannot be well met

Infrared methane sensors are expensive, and the sensing elements are seriously affected by dust and water vapor, which cannot well meet the application requirements of the Internet of Things for low-power and high-performance methane sensors.

Existing thermal conductivity methane sensors are used to detect high-concentration methane-based methane gas in coal mines, but cannot be used for detection of low-concentration (0-4%) methane-based methane gas due to its low sensitivity Call the police

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