Silicon-heater-based MEMS (microelectromechanical system) methane sensor and preparation method and application thereof

Abstract

The invention discloses a silicon-heater-based MEMS (microelectromechanical system) methane sensor and a preparation method thereof, belongs to a methane sensor and a preparation method thereof, and particularly belongs to a methane sensor adopting a microelectromechanical system manufacturing technology and a preparation method and a methane detection method thereof. The methane sensor adopts an ordinary monocrystalline silicon wafer for manufacturing a silicon heater, the silicon heater is used as a methane-sensitive element, and a catalyst carrier and a catalyst material are not required; the preparation method of the methane sensor is compatible with a CMOS (complementary metal oxide semiconductor) technology; in case of batch production, the methane sensors have an advantage of low price and can be calibrated in batches; the methane sensor has the characteristics of low power consumption, high sensitivity , fast response, no influence on methane detection during oxygen shortage, and no influence from carbon deposition, poisoning and catalysts.

Description

technical field [0001] The invention relates to a sensor and its preparation method and application, in particular to a MEMS methane sensor based on a silicon heater used in industrial and mining enterprises for gas prevention and control, as well as its preparation method and application. Background technique [0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of a large number of personal mobile monitoring equipment for low-power consumption, long-life, low-cost high-performance methane sensors that detect low-concentration methane. At present, the catalytic combustion methane sensor based on the traditional platinum wire heating is still widely used in coal mines. The principle is based on the heat release effect of the catalytic combustion reaction of methane gas. It consumes a lot of power, and there are many insurmountable shortcomings due to the use of catalysts. Such as short adjustment cycle, carbon deposition, ...

AI Technical Summary

Problems solved by technology

The existing catalytic combustion methane sensor uses a coil wound with precious metals such as platinum wire as the heating element, which is difficult to mass produce, has poor consistency, and consumes a lot of power

Therefore, the application requirements of the Internet of Things for methane sensors cannot be well met

Infrared methane sensors are expensive, and the sensing elements are seriously affected by dust and water vapor, which cannot well meet the application requirements of the Internet of Things for low-power and high-performance methane sensors.

Existing thermal conductivity methane sensors are used to detect high-concentration methane-based methane gas in coal mines, but cannot be used for detection of low-concentration (0-4%) methane-based methane gas due to its low sensitivity Call the police

Images