MEMS (micro-electromechanical system) methane sensor as well as application and preparation method thereof

Abstract

The invention discloses an MEMS (micro-electromechanical system) methane sensor as well as application and a preparation method thereof. The MEMS methane sensor is suitable for coal mine detection. The invention particularly belongs to a methane sensor adopting an MEMS processing technology and a methane detection method thereof. According to the sensor, common monocrystalline silicon is used as a material of a heating element; the heating element is also used as a sensitive element, and no catalyst carrier and no catalyst material are needed; a processing technology is compatible with a CMOS (complementary metal oxide semiconductor) technology; the heating element is released by adopting a wet silicon etching technology which can realize synchronous etching in two directions. The sensor has the advantages of low cost, high sensitivity and low power consumption, and the measurement cannot be influenced by the oxygen concentration and cannot be influenced by carbon deposition and poisoning.

Description

technical field [0001] The invention relates to a methane sensor and its application and preparation method, and is especially suitable for a MEMS methane sensor used in coal mine safety detection and its application and preparation method. Background technique [0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost. At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines. It consumes a lot of power. The use of catalysts leads to unstable methane detection performance and short calibration time. Poisoning, activation and other disadvantages caused by the use of catalysts; while the infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; the...

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Problems solved by technology

[0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost

At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines. It consumes a lot of power. The use of catalysts leads to unstable methane detection pe

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