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MEMS (micro-electromechanical system) methane sensor as well as application and preparation method thereof

A methane sensor, wet method, applied in material resistance and other directions, can solve the problems of high power consumption, short calibration time, and high price of infrared methane sensors, and achieve the effect of low power consumption and improved sensitivity

Inactive Publication Date: 2015-01-28
CHINA UNIV OF MINING & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost
At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines. It consumes a lot of power. The use of catalysts leads to unstable methane detection performance and short calibration time. Poisoning, activation and other disadvantages caused by the use of catalysts; while the infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; these two methane sensors cannot well meet the requirements of the Internet of Things for low power consumption. Application Requirements for Methane Sensors
Other methane sensors cannot adapt to the complex environment of high humidity in coal mines

Method used

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  • MEMS (micro-electromechanical system) methane sensor as well as application and preparation method thereof
  • MEMS (micro-electromechanical system) methane sensor as well as application and preparation method thereof
  • MEMS (micro-electromechanical system) methane sensor as well as application and preparation method thereof

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Embodiment Construction

[0051] An embodiment of the present invention will be further described below in conjunction with accompanying drawing:

[0052] Such as figure 1 , figure 2 , image 3 As shown, the MEMS methane sensor of the present invention includes a P-type silicon substrate 01, and an N-type silicon 02 is arranged on the P-type silicon substrate 01; Element 101; the silicon heating element 101 includes two fixed ends 102, a silicon heater 1011, and two silicon cantilevers 1012; the length of the single silicon cantilever 1012 is at least 300um; one end of the single silicon cantilever 1012 is connected to the silicon heating The other end is connected to a fixed end 102 to provide electrical connection for the silicon heater 1011; the two silicon cantilevers 1012 are arranged in parallel and side by side, forming a U-shaped cantilever structure with the silicon heater 1011 as a whole, and the silicon heater 1011 Suspended in the air; the silicon heater 1011 of the silicon heating elem...

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Abstract

The invention discloses an MEMS (micro-electromechanical system) methane sensor as well as application and a preparation method thereof. The MEMS methane sensor is suitable for coal mine detection. The invention particularly belongs to a methane sensor adopting an MEMS processing technology and a methane detection method thereof. According to the sensor, common monocrystalline silicon is used as a material of a heating element; the heating element is also used as a sensitive element, and no catalyst carrier and no catalyst material are needed; a processing technology is compatible with a CMOS (complementary metal oxide semiconductor) technology; the heating element is released by adopting a wet silicon etching technology which can realize synchronous etching in two directions. The sensor has the advantages of low cost, high sensitivity and low power consumption, and the measurement cannot be influenced by the oxygen concentration and cannot be influenced by carbon deposition and poisoning.

Description

technical field [0001] The invention relates to a methane sensor and its application and preparation method, and is especially suitable for a MEMS methane sensor used in coal mine safety detection and its application and preparation method. Background technique [0002] With the development of the Internet of Things, the current methane sensors cannot meet the needs of individual equipment for methane sensors that detect low-concentration methane with low power consumption, long life, and low cost. At present, the catalytic combustion methane sensor based on traditional platinum wire heating is still used to detect low-concentration methane in coal mines. It consumes a lot of power. The use of catalysts leads to unstable methane detection performance and short calibration time. Poisoning, activation and other disadvantages caused by the use of catalysts; while the infrared methane sensor is expensive, and the sensing element is seriously affected by dust and water vapor; the...

Claims

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Application Information

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IPC IPC(8): G01N27/18
CPCG01N27/18
Inventor 马洪宇丁恩杰刘晓文赵小虎
Owner CHINA UNIV OF MINING & TECH
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