An optical system image quality infrared heating compensation device
An infrared heating and optical system technology, applied in optics, optical components, instruments, etc., can solve the problems of low compensation accuracy, limited number of Zernike aberration components, complex structure, etc., to achieve the effect of spot position
Active Publication Date: 2016-10-26
BEIJING GUOWANG OPTICAL TECH CO LTD
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Problems solved by technology
[0004] The purpose of the present invention is to propose an optical system image quality infrared heating compensation device, which solves the problems of complex structure, low compensation accuracy and limited number of compensation components for Zernike aberration existing in the prior art
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[0023] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0024] See attached figure 1 , attached figure 2 And attached image 3 , an optical system image quality infrared heating compensation device of the present invention comprises a picture frame 2, a flange 3, a beam expander 4, an optical platform 5, an infrared heating compensation system and an acrylic cover 6; an optical element 1 is fixed on the picture frame 2 , two laser spot light exit holes 201 are uniformly distributed on the circumference of the frame 2, and the two beam expanders 4 are respectively fixed in the laser spot light exit holes 201 through flanges 3;
[0025] The optical table 5 is provided with an infrared heating compensation system, and the infrared heating compensation system is covered on the optical table 5 through an acrylic cover 6 as a whole. The infrared heating compensation system includes a laser 7 and two sets of heat...
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The invention discloses an optical system image quality infrared heating compensating device and belongs to the field of optical image quality compensating of an optical system. The problems that in the prior art, the structure is complex, compensating accuracy is low, and a Zernike aberration compensating component item number is limited are solved. An optical element is fixed on an optical frame, and n light beam expanding devices are fixed in laser spot outlet holes of the optical frame through flanges respectively. A whole infrared heating compensating system is arranged on an optical platform in a covering mode through an acrylic cover. The infrared heating compensating system comprises a laser device and n groups of heating systems. Light emitted out by the laser device is subjected to light splitting of a light splitter and is emitted into the n groups of heating systems through a full-reflecting mirror respectively. Light transmission devices of the n groups of heating systems are connected with the light beam expanding devices through locating sleeves. Light emitted into the heating systems is subjected to attenuation through a light beam power attenuation device and then is irradiated to the optical element through the light transmission devices and the light beam expanding devices which can adjust out-light direction, and image quality compensating is achieved.
Description
technical field [0001] The invention belongs to the field of optical image quality compensation of optical systems, and in particular relates to an infrared heating compensation device for optical system image quality. Background technique [0002] With the rapid development of the field of optical applications, the requirements for the resolution and productivity of the optical system continue to increase. The increase in the number of lenses and the increase in the exposure dose can effectively improve the resolution and productivity of the optical system, but the adoption of the above methods is inevitable. The introduction of the aberration of the optical system causes the optical system to fail to meet the design specifications, which makes the infrared heating compensation device for the image quality of the optical system very necessary. [0003] The optical system image quality compensation technology in the prior art includes passive compensation technology based on...
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IPC IPC(8): G02B27/09G02B27/00
CPCG02B27/0081G02B27/0905G02B27/0927
Inventor 周连生东立剑倪明阳张巍隋永新杨怀江
Owner BEIJING GUOWANG OPTICAL TECH CO LTD